System and method for providing access to an encapsulated device
View Patent ↗A method for providing access to a feature on a device wafer, and located outside an encapsulation region is described. The method includes forming a cavity in the lid wafer, aligning the lid wafer with the device wafer so that the cavity is located substantially above the feature, and removing material substantially uniformly from the bottom surface of the lid wafer, until an aperture is formed at the cavity, over the feature on the device wafer. By removing material from the lid wafer in a substantially uniform manner, difficulties with the prior art procedure of saw cutting, such as alignment and debris generation, are avoided.
1. A method for forming an encapsulated device, comprising:
forming at least one device on a device wafer;
forming at least one feature associated with the device on the device wafer;
forming a first cavity in a first side of a lid wafer, the cavity being defined by sidewalls which are substantially non-parallel along substantially an entire length of the sidewalls, such that the cavity is substantially wider at its mouth than at its base;
aligning the lid wafer and the device wafer so that the first cavity is located substantially above the feature; and
removing material substantially uniformly across a second side of the lid wafer, until at least one aperture is formed through the lid wafer above the feature.
2. The method of claim 1 , wherein the at least one feature is at least one probe pad electrically coupled to the device.
3. The method of claim 1 , wherein removing material substantially uniformly across the second side of the lid wafer comprises at least one of grinding, ion milling, lapping, chemical mechanical polishing, wet etching and dry etching the back side of the lid wafer.
4. The method of claim 2 , further comprising probing the device by applying a probe tool to the at least one probe pad electrically coupled to the device formed on the device wafer.
5. The method of claim 1 , further comprising:
forming a second cavity in the first side of the lid wafer, located substantially over the device to form the encapsulated device, after aligning the lid wafer and the device wafer.
6. The method of claim 1 , further comprising:
bonding the lid wafer to the device wafer to encapsulate the device; and
singulating the encapsulated device from the device wafer.
7. The method of claim 3 , wherein grinding the second side of the lid wafer comprises grinding the back side of the lid wafer with media impregnated with at least one of embedded diamond, embedded alumina and embedded silica particles.
8. The method of claim 3 , wherein grinding the back side of the lid wafer comprises a rough grinding step and a fine grinding step.
9. The method of claim 2 , further comprising:
testing the functionality of the encapsulated device by probing the at least one probe pad.
10. The method of claim 1 , wherein forming the first cavity further comprises forming the first cavity at least about 150 μm deep and removing material comprises removing at least about 350 μm of material from a lid wafer with a thickness of about 500 μm.
11. The method of claim 5 , wherein forming the first cavity and the second cavity comprises forming the first cavity and second cavity by at least one of wet etching and dry etching the lid wafer.
12. The method of claim 1 , further comprising coupling the lid wafer to the device wafer with an adhesive, wherein the adhesive comprises at least one of glue, epoxy, glass frit, cement, metal or a metal alloy.
13. The method of claim 1 , wherein removing material substantially across a second side comprises removing material by grinding in at least two steps: a first grinding step followed by a smoother, slower grinding step.
14. The method of claim 13 , wherein the first step removes material at a rate of about 60 μm per minute, and the second step removes material at a rate of about 20 μm per minute.
15. The method of claim 13 , wherein the first grinding step uses a different an abrasive pad with different characteristics than the second grinding step.
16. The method of claim 13 , wherein removing material substantially across a second side further comprises lapping the second side with an abrasive slurry.
17. The method of claim 1 , wherein the encapsulated devices are MEMS devices.
18. The method of claim 17 , wherein the MEMS devices are at least one of actuators, sensors, valves, pistons, and switches.
19. The method of claim 5 , wherein forming the second cavity comprises etching the lid wafer in potassium hydroxide to form device cavities with a depth of about 75 μm.
20. The method of claim 5 , wherein the devices are singulated by sawing through only the device wafer, without sawing the lid wafer.