Semiconductor device
View Patent ↗Provided is a semiconductor device in which an insulating region surrounding an element region is provided in an end portion of a semiconductor region with a super junction structure. Since a depletion layer in the element region ends in the insulating region, the end portion of the element region is not formed in a curved surface shape. In other words, the depletion layer has no curved surface in which internal electric fields are concentrated. For this reason, there is no need to take a measure to cause the depletion layer to spread in a horizontal direction by proving a terminal region. Since the terminal region is unnecessary, a chip size can be reduced. Alternatively, an area of the element region can be expanded.
1. A semiconductor device comprising:
a semiconductor substrate of a first general conductivity type;
a plurality of first semiconductor layers of the first general conductivity type standing on the semiconductor substrate;
a plurality of second semiconductor layers of a second general conductivity type standing on the semiconductor substrate so that each of the second semiconductor layers forms a pn junction perpendicular to the semiconductor substrate with a corresponding first semiconductor layer;
a plurality of transistors formed on the first and second semiconductor layers; and
an insulating layer standing on an outermost peripheral portion of the semiconductor substrate and surrounding the first and second semiconductor layers so as to define a sidewall of the semiconductor device.
2. The semiconductor device of claim 1 , wherein the transistors comprise insulating gate type transistors.