Process of using a polishing apparatus including a platen window and a polishing pad
View Patent ↗A polishing pad can include a first layer and a second layer. The first layer can have a first polishing surface and a first opening. The second layer can have an attaching surface and a second opening substantially contiguous with the first opening. The polishing pad can further include, a pad window lying within the first opening. The pad window can include a second polishing surface. When the pad would be attached to a platen, the first and second polishing surfaces can lie along a same plane, and an opposing surface of the pad window can abut an exterior surface of a platen window. In another aspect, a polishing apparatus can include an exterior surface of a platen window abutting the polishing pad. In still another aspect, a process of polishing can include polishing a workpiece such that the pad window contacts the workpiece and the platen window simultaneously.
1. A process of polishing comprising:
providing a polishing apparatus comprising:
a platen having a platen surface lying along a first plane;
a platen window having a window surface lying along a second plane different from the first plane; and
a polishing pad attached to the platen surface and including:
a first layer including a first polishing surface and a first opening, wherein the first opening extends through the first layer and has a first perimeter;
a second layer distinct from and adjacent to the first layer, wherein the second layer comprises a second opening extending through the second layer and having a second perimeter different from the first perimeter of the first opening; and
a pad window lying within the first opening of the first layer and the second opening of the second layer, and abutting the window surface of the platen window; wherein the platen window extends into the second opening but not into the first opening;
applying a fluid to the polishing pad;
placing a workpiece adjacent to the polishing pad;
compressing the polishing pad between the workpiece and the platen; and
polishing the workpiece such that the pad window contacts the workpiece.
2. The process of claim 1 , wherein providing the polishing apparatus comprises providing the polishing apparatus, wherein the window surface lies at an elevation between the platen surface and the first polishing surface.
3. The process of claim 1 , wherein providing the polishing apparatus comprises providing the polishing apparatus, wherein the second opening of the second layer is substantially contiguous with the first opening of the first layer.
4. The process of claim 1 , wherein providing the polishing apparatus comprises providing the polishing apparatus wherein:
the second layer of the polishing pad includes a pad attaching surface attached to the platen surface; and
the second layer of the polishing pad lies between the platen surface and the first layer of the polishing pad.
5. The process of claim 1 , wherein the second layer includes a different material as compared to the first layer.
6. The process of claim 1 , further comprising:
directing a radiation beam through a polishing surface of the pad window; and
detecting a predetermined wavelength or spectrum of radiation from the radiation beam.
7. The process of claim 1 , wherein the pad window comprises a rubber based material, a polyethylene, a polytetrafluoroethylene, a polypropylene, or any combination thereof.
8. The process of claim 6 , wherein the fluid is substantially opaque to the predetermined wavelength or spectrum of radiation.
9. The process of claim 6 , wherein directing the radiation beam further comprises directing the radiation beam such that the radiation beam enters a bottom surface of the platen window, wherein the bottom surface is spaced apart from the window surface and lies along a third plane that intersects the first and second planes.
10. A process of polishing comprising:
providing a polishing apparatus comprising:
a platen having a platen surface lying along a first plane;
a platen window having a window surface lying along a second plane that is substantially parallel to and different from the first plane; and
a polishing pad comprising:
a first layer including a first polishing surface and a first opening extending through the first layer, wherein the first polishing surface lies along a third plane that is substantially parallel to and different from the first and second planes, and wherein the second plane lies between the first and third planes;
a second layer distinct from and adjacent to the first layer, wherein:
the second layer has a pad attaching surface lying closer to the platen than to the first layer, and an opposing surface opposite the pad attaching surface and lying closer to the first layer than to the platen; and
a second opening extending through the second layer, the second opening is substantially contiguous with the first opening of the first layer; and
a pad window lying within the first and second openings, wherein the window surface lies at an elevation between the pad attaching and opposite surfaces of the second layer;
applying a fluid to the first polishing surface, wherein the polishing pad is attached to the platen;
placing a workpiece adjacent to the polishing pad;
compressing the polishing pad between the workpiece and the platen; and
polishing the workpiece such that the pad window contacts the workpiece.
11. The process of claim 10 , wherein providing the polishing apparatus comprises providing the polishing apparatus, wherein a portion of a side surface of the platen window lies at an elevation between the first and third planes.
12. The process of claim 11 , wherein providing the polishing apparatus comprises providing the polishing apparatus, wherein the portion of the side surface of the platen window lies at an elevation between the first and second planes.
13. The process of claim 10 , wherein the pad window comprises a rubber based material, a polyethylene, a polytetrafluoroethylene, a polypropylene, or any combination thereof.
14. The process of claim 10 , further comprising:
directing a radiation beam through a polishing surface of the pad window; and
detecting a predetermined wavelength or spectrum of radiation from the radiation beam.
15. The process of claim 14 , wherein:
the radiation beam enters a bottom surface of the platen window;
the bottom surface is spaced apart from the window surface and lies along a fourth plane that intersects the first, second, and third planes; and
the first, second, and third planes are substantially parallel to one another.
16. The process of claim 14 , wherein:
the radiation beam exits a bottom surface of the platen window before being detected;
the bottom surface is spaced apart from the window surface and lies along a fourth plane that intersects the first, second, and third planes; and
the first, second, and third planes are substantially parallel to one another.
17. The process of claim 10 , wherein providing the polishing apparatus comprises providing the polishing apparatus, wherein the second layer includes a different material as compared to the first layer.
18. The process of claim 10 , wherein the pad window has a composition that is capable of allowing transmission of a predetermined wavelength or spectrum of radiation.