COOLING TRAP UNIT
A cooling trap unit including a vacuum vessel with a drain port, a refrigerator connected to the vacuum vessel such that an endothermic unit is located on a vacuum side, and a cooling panel which is fixed to the endothermic unit to be in tight contact with it and condenses or solidifies gas, includes a water reservoir unit capable of storing liquefied liquid in the vacuum vessel, when liquefying the gas condensed or solidified by the cooling panel and discharging the liquid outside the vacuum vessel, such that the liquefied liquid is in contact with the cooling panel, and a detection unit for discharging the liquid stored in the water reserving unit through the drain port based on a detection signal which is obtained by detecting a change in temperature of the liquid and indicates that the temperature reaches a predetermined value
1 . A cooling trap unit including a vacuum vessel with a drain port, a refrigerator connected to said vacuum vessel such that an endothermic unit is located on a vacuum side, and a cooling panel which is fixed to said endothermic unit to be in tight contact therewith and condenses or solidifies gas, comprising;
water reservoir means capable of storing liquefied liquid in said vacuum vessel, when liquefying the gas condensed or solidified by said cooling panel and discharging the liquid outside said vacuum vessel, such that the liquefied liquid is in contact with said cooling panel; and
detection means for discharging the liquid stored in said water reserving means through said drain port based on a detection signal which is obtained by detecting a change in temperature of the liquid and indicates that the temperature reaches a predetermined value.
2 . The unit according to claim 1 , wherein said water reserving means includes a water tank which is arranged below said cooling panel in said vacuum vessel and includes an area smaller than that of a bottom of said vacuum vessel.
3 . The unit according to claim 2 , wherein said vacuum vessel includes
a first drain port to discharge the liquid stored in said water tank, and
a second drain port to discharge the liquid stored outside said water tank.
4 . The unit according to claim 1 , further comprising heating means for heating said cooling panel from outside said vacuum vessel when discharging the gas condensed or solidified by said cooling panel to outside said vacuum vessel.
5 . The unit according to claim 1 , wherein said cooling panel is provided with a plurality of groove-like steps in a surface thereof, which are formed in one of a longitudinal direction and an oblique direction and extend downward from above in a direction of gravity.