Semiconductor integrated circuit
View Patent ↗The invention provides a semiconductor integrated circuit preventing an electrostatic breakdown due to a surge voltage applied to a power supply wiring or a ground wiring and preventing noise interference between a digital circuit and an analog circuit. By providing a first electrostatic breakdown protection diode and a first electrostatic breakdown protection bipolar transistor in a first island region, the first electrostatic breakdown protection diode and the first electrostatic breakdown protection bipolar transistor turn on when a surge voltage is applied to a first ground wiring and protect a digital circuit against an electrostatic breakdown. Furthermore, a first isolation layer is contacted with the first ground wiring in a position that is more adjacent to a first ground pad than the digital circuit, and a second isolation layer is contacted with a second ground wiring in a position that is more adjacent to a second ground pad than an analog circuit. This prevents noise interference between the digital circuit and the analog circuit.
1. A semiconductor integrated circuit comprising:
a semiconductor substrate of a first general conductive type;
a semiconductor layer of a second general conductive type formed on the semiconductor substrate;
a first circuit formed on the semiconductor substrate;
a first ground pad formed on the semiconductor substrate and receiving a ground voltage;
a first ground wiring connecting the first ground pad and the first circuit and supplying the ground voltage to the first circuit;
a first power supply wiring supplying a first power supply voltage to the first circuit;
a first isolation layer of the first general conductivity type formed in the semiconductor layer so as to isolate part of the semiconductor layer from other part of the semiconductor layer as a first island region of the second general conductivity type;
a first electrostatic breakdown protection diode formed between the first power supply wiring and the first ground wiring by connecting the first island region to the first power supply wiring;
a second circuit formed on the semiconductor substrate;
a second ground pad formed on the semiconductor substrate and receiving the ground voltage;
a second ground wiring connecting the second ground pad and the second circuit and supplying the ground voltage to the second circuit;
a second power supply wiring supplying a second power supply voltage to the second circuit;
a second isolation layer of the first general conductivity type formed in the semiconductor layer so as to isolate part of the semiconductor layer from other part of the semiconductor layer as a second island region of the second general conductivity type; and
a second electrostatic breakdown protection diode formed between the second power supply wiring and the second ground wiring by connecting the second island region to the second power supply wiring,
wherein the first isolation layer is connected to the first ground wiring in a position that is closer to the first ground pad than to the first circuit.
2. The semiconductor integrated circuit of claim 1 , wherein the second electrostatic breakdown protection diode is formed by connecting the second isolation layer to the second ground wiring in a position that is closer to the second ground pad than to the second circuit.
3. The semiconductor integrated circuit of claim 2 , wherein the first electrostatic breakdown protection diode is disposed closer to the first ground pad than to the first circuit, and the second electrostatic breakdown protection diode is disposed closer to the second ground pad than to the second circuit.
4. The semiconductor integrated circuit of claim 2 , wherein the first electrostatic breakdown protection diode and the second electrostatic breakdown protection diode are disposed between the first ground pad and the second ground pad.
5. The semiconductor integrated circuit of claim 2 , further comprising a first electrostatic breakdown protection device formed in the first island region so as to be connected in parallel to the first electrostatic breakdown protection diode, and a second electrostatic breakdown protection device formed in the second island region so as to be connected in parallel to the second electrostatic breakdown protection diode.
6. The semiconductor integrated circuit of claim 5 , wherein the first and second electrostatic breakdown protection devices comprise a bipolar transistor or a MOS transistor.
7. The semiconductor integrated circuit of claim 1 , wherein the first electrostatic breakdown protection diode is disposed closer to the first ground pad than to the first circuit, and the second electrostatic breakdown protection diode is disposed closer to the second ground pad than to the second circuit.
8. The semiconductor integrated circuit of claim 1 , wherein the first electrostatic breakdown protection diode and the second electrostatic breakdown protection diode are disposed between the first ground pad and the second ground pad.
9. The semiconductor integrated circuit of claim 1 , further comprising a first electrostatic breakdown protection device formed in the first island region so as to be connected in parallel to the first electrostatic breakdown protection diode, and a second electrostatic breakdown protection device formed in the second island region so as to be connected in parallel to the second electrostatic breakdown protection diode.
10. The semiconductor integrated circuit of claim 9 , wherein the first and second electrostatic breakdown protection devices comprise a bipolar transistor or a MOS transistor.
11. The semiconductor integrated circuit of claim 1 , wherein the second electrostatic breakdown protection diode is formed by connecting the second isolation layer to the first ground wiring through the semiconductor substrate, and the second isolation layer is not connected to the second ground wiring.
12. The semiconductor integrated circuit of claim 1 , further comprising another ground wiring connecting the first isolation layer and the position of the first ground wiring, wherein the another ground wiring is physically in contact with the first isolation layer.
13. A semiconductor integrated circuit comprising:
a semiconductor substrate of a first general conductive type;
a semiconductor layer of a second general conductive type formed on the semiconductor substrate;
a circuit formed on the semiconductor substrate;
a ground pad formed on the semiconductor substrate and receiving a ground voltage;
a ground wiring connecting the ground pad and the circuit and supplying the ground voltage to the circuit;
a power supply wiring supplying a power supply voltage to the circuit;
an isolation layer of the first general conductivity type formed in the semiconductor layer so as to isolate part of the semiconductor layer from other part of the semiconductor layer as an island region of the second general conductivity type;
an electrostatic breakdown protection diode formed between the power supply wiring and the ground wiring by connecting the island region to the power supply wiring;
wherein the isolation layer is connected to the ground wiring in a position that is closer to the ground pad than to the circuit.
14. The semiconductor integrated circuit of claim 13 , further comprising another ground wiring connecting the isolation layer and the position of the ground wiring, wherein the another ground wiring is physically in contact with the isolation layer.