Method for producing an integrated circuit and arrangement comprising a substrate
View Patent ↗Embodiments of the invention relate to an integrated circuit comprising a carrier, having a capacitor with a first electrode and a second electrode. The first electrode has a dielectric layer A layer sequence is arranged on the carrier, the capacitor being introduced in said layer sequence, wherein the layer sequence has a first supporting layer and a second supporting layer arranged at a distance above the first supporting layer, wherein the first and the second supporting layer adjoin the first electrode of the capacitor. Methods of manufacturing the integrated circuit are also provided.
1. An integrated circuit, comprising:
a carrier, the carrier comprising:
a capacitor, the capacitor comprising a first electrode, a dielectric layer, and a second electrode;
a first supporting layer; and
a second supporting layer arranged at a greater distance from a substrate than the first supporting layer, and the first supporting layer arranged at a greater distance from the substrate than a portion of the first electrode of the capacitor,
wherein respective portions of the first and second supporting layers are between respective portions of both the first and second electrodes and the substrate.
2. The integrated circuit as claimed in claim 1 , wherein at least one insulation layer is formed on the carrier, the insulating layer including a contact extending from the carrier to the first electrode of the capacitor.
3. The integrated circuit as claimed in claim 1 , wherein the first and the second supporting layers have substantially identical cross-sectional areas.
4. The integrated circuit as claimed in claim 1 , wherein the first and the second supporting layers comprise the same material.
5. The integrated circuit as claimed in claim 1 , wherein the first electrodes are formed in pot-shaped fashion having a height relative to the substrate, wherein the first supporting layer is arranged in a middle third of the height.
6. The integrated circuit as claimed in claim 1 , wherein a portion of the second electrode at a same distance from the substrate as the first or second supporting layer is between a second portion of the first electrode and the substrate.