Device and method for liquid treating disc-like articles

1. A device for liquid treatment of a disc-like article, comprising:

a spin chuck for holding and rotating a disc-like article;

dispensing means for dispensing liquid onto the disc-like article;

liquid collecting means for collecting the liquid, which is flung off the disc-like article when the disc-like article is rotated;

a plate arranged parallel to the disc-like article and facing the disc-like article when the disc-like article is held by the spin chuck; and

gas-guide means for directing gas parallel to the plate across the plate from one circumferential edge of the plate to another circumferential edge of the plate,

wherein the gas-guide means comprises an exhaust for collecting the gas and a gas source for providing the gas, the exhaust and gas source being arrange opposite to each other with respect to a symmetrical plane, which is perpendicular to a plane of the disc-like article when the disc-like article is rotated, and

wherein the exhaust comprises an exhaust chamber having a shape of a first section of a ring chamber and the gas source comprises a gas source chamber having a shape of a second section of the ring chamber.

2. The device according to claim 1 , wherein the first section of the ring chamber, and the second section of the ring chamber are connected to an area between the plate and the disc-like article via a slot shaped annular opening.

3. The device according to claim 2 , wherein the first section of the ring chamber and the second section of the ring chamber are members of the same ring chamber.

4. The device according to claim 3 , wherein the first section of the ring chamber and the second section of the ring chamber are separated from each other by a radial wall.

5. The device according to claim 1 , wherein a splash guard is provided for directing the liquid, which is flung off the disc-like article when rotated, into an annular duct.

6. The device according to claim 1 , further comprising a lifting mechanism that can alter the distance between the plate and the disc-like article.

7. A method for liquid treatment of a disc-like article, comprising:

rotating a disc-like article;

dispensing liquid onto the disc-like article when the disc-like article is rotated;

collecting the liquid, which is flung off the disc-like when the disc-like article is rotated;

providing a plate arranged parallel to the disc-like article and facing the disc-like article when the disc-like article is rotated; and

directing gas parallel to the plate across the plate from one circumferential edge of the plate to another circumferential edge of the plate using gas-guide means,

wherein the gas-guide means comprises an exhaust for collecting the gas and a gas source for providing the gas, the exhaust and gas source are arranged opposite each other with respect to a symmetric plane, which is perpendicular to a plane of the disc-like article when the disc-like article is rotated, and

wherein the exhaust comprises an exhaust chamber having a shape of a first section of a ring chamber and the gas source comprises a gas source chamber having a shape of a second section of the ring chamber.

8. The method according to claim 7 , wherein the disc-like article rotates at a speed of at least 10 rpm at least part of the time when the gas flows across the plate.

9. The method according to claim 7 , wherein the disc-like article is held in a distance of at least 5 mm from the plate when the gas flows parallel to the plate across the plate.