Patent Assignment
Reel/Frame 023075/0238
Change of Name
Recorded: 2009-08-11
Pages: 20
Assignor
SEZ AG
Executed: 2009-07-18
Assignee
LAM RESEARCH AG
SEZ-STRASSE 1, A-9500 VILLACH, AUSTRIA
Covered Properties
(62)
Support for Disk-Shaped Articles
Patent:
5,513,668 →
Application:
08/194,325 →
Method and Apparatus for Cleaning Integrated Circuit Wafers
Patent:
5,505,785 →
Application:
08/276,202 →
Method and Apparatus for Drying Parts and Microelectronic Components, Including Integrated Circuit Wafers Using Sonic Created Mist
Patent:
5,653,045 →
Application:
08/484,921 →
Method and Apparatus for Drying Objects Using Aerosols
Patent:
5,685,086 →
Application:
08/616,165 →
Gripper for Disk-Shaped Articles
Patent:
5,762,391 →
Application:
08/632,457 →
A Method for Removing Chemical Residues from a Surface
Patent:
6,036,785 →
Application:
08/850,272 →
Chemical Bath Apparatus
Patent:
5,909,741 →
Application:
08/879,576 →
Process and Device for Drying of Substrates
Patent:
6,016,612 →
Application:
08/942,540 →
Support for Wafer-Like Objects
Patent:
5,896,877 →
Application:
08/971,754 →
Support for Wafer-Shaped Objects, in Particular Silicon Wafers
Patent:
6,022,417 →
Application:
08/981,930 →
Methods for Drying and Cleaning Objects Using Aerosols
Patent:
5,964,958 →
Application:
08/984,413 →
Chemical Drying and Cleaning System
Patent:
5,974,689 →
Application:
09/034,369 →
Process and Device for One-Sided Treatment of Diskshaped Objects
Patent:
6,149,759 →
Application:
09/038,288 →
Arrangement for Treatment of Wafer-Shaped Articles, Particularly Silicon Wafers
Patent:
6,193,798 →
Application:
09/079,455 →
Nrrangement for Treatment of Wafer-Shaped Articles, Particularly Silicon Wafers
Patent:
5,904,164 →
Application:
09/080,236 →
Methods for Drying and Cleaning of Objects Using Aerosols and Inert Gases
Patent:
5,968,285 →
Application:
09/090,453 →
Gripper for Wafer-Shaped Articles
Patent:
5,931,518 →
Application:
09/093,187 →
Rotary Chuck Including Pins for Lifting Wafers
Patent:
6,056,825 →
Application:
09/098,507 →
Chemical Drying and Cleaning System
Patent:
6,119,366 →
Application:
09/109,460 →
Apparatus for Preventing Dripping from Conduit Openings
Patent:
6,056,208 →
Application:
09/156,598 →
Conveying Device for Thin Disk-Like Articles
Patent:
6,152,507 →
Application:
09/211,414 →
Process for Wet Etching of Semiconductor Wafers
Patent:
6,162,739 →
Application:
09/248,094 →
Method for Rough-Etiching a Semiconductor Surface
Patent:
6,169,038 →
Application:
09/251,288 →
Metal Deposit Process
Patent:
6,180,524 →
Application:
09/371,296 →
Apparatues for Drying and Cleaning Objects Using Controlled Aerosols and Gases
Patent:
6,270,584 →
Application:
09/417,203 →
Device for Wet Etching an Edge of a Semiconductor Disk
Patent:
6,494,221 →
Application:
09/442,190 →
Device for an etch treatment of a disk-like object
Patent:
6,328,846 →
Application:
09/484,873 →
Process and Device for Handling Disk-Like Objects, Especially Silicon Wafers
Patent:
6,316,367 →
Application:
09/537,705 →
Device for Discharging Two or More Media with Media Nozzles
Patent:
6,383,331 →
Application:
09/542,337 →
Device and Process for Liquid Treatment of Wafer-Shaped Articles
Patent:
6,435,200 →
Application:
09/556,426 →
Process and Device for Drying Disk-Like Objects
Patent:
6,385,863 →
Application:
09/586,762 →
Method and Device for Measuring Cavitation
Patent:
6,944,097 →
Application:
09/614,485 →
Process for Treating Semiconductor Substrates
Patent:
6,627,548 →
Application:
09/617,500 →
Metal Deposit Process
Device for Treating a Disc-Shaped Object
Device for Liquid Treatment of Wafer-Shaped Articles
Process for Planarizing Substrates of Semiconductor Technology
Device and Process for Liquid Treatment of Wafer-Shaped Articles
Annular Receptacle for a Rotating Carrier
Method for the Wet Treatment of Disk-Like Objects
Device for Liquid Treatment of Disk-Shaped Objects
Device and Method for Transporting Wafer-Shaped Articles
Device and Method for Wet Treating Disc-Shaped Articles
Device and Method for Wet Treating Disc-Like Substrates
Method for selective etching
Application:
10/588,766 →
Publication:
US 2007/0158307
Device and Process for Liquid Treatment of Wafer-Shaped Articles
Device for Liquid Treatment of Wafer-Shaped Articles
Wafer Dryer and Method for Drying a Wafer
Method and Device for Measuring Cavitation
Device and Process for Liquid Treatment of Wafer-Shaped Articles
Device for Liquid Treatment of Wafer-Shaped Articles
Method for Selective Etching
Apparatus and Method For Wet Treatment of Wafers
Application:
11/667,698 →
Publication:
US 2007/0295367
Apparatus And Method For Drying Disk-Shaped Substrates
Application:
11/791,953 →
Publication:
US 2008/0011330
Method for Removing Particles from a Semiconductor Surface
Method for Drying a Surface
Device and Method for Liquid Treatment of Wafer-Shaped Articles
Device and Method for Liquid Treating Disc-Like Articles
Device for Fluid Treating Plate-Like Articles
Device and Method for Wet Treating Plate-Like Substrates
Application:
12/299,647 →
Publication:
US 2009/0235952
Device and Method for Wet Treating Plate-Like-Articles
Method for Cleaning a Surface
Related Assignments
(25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Jan 23, 1996
From: SUMNITSCH, FRANZ
To: SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG GESELLSCHAFT M.B.H.
Reel/Frame 007782/0775 →
Assignment of Assignor's Interest
Apr 19, 1996
From: SUMNITSCH, FRANZ
To: SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG GESELLSCHAFT M.B.H.
Reel/Frame 008172/0623 →
Assignment of Assignor's Interest
Mar 3, 1998
From: ELSON, ROBERT J.; SCHIPPER, JOHN F.
To: GARY W. FERRELL
Reel/Frame 009024/0432 →
Assignment of Assignor's Interest
Mar 11, 1998
From: GUGGENBERGER, GUNTHER
To: SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG AG
Reel/Frame 009042/0514 →
Assignment of Assignor's Interest
May 15, 1998
From: SUMNITSCH, FRANZ
To: SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG AG
Reel/Frame 009177/0618 →
Assignment of Assignor's Interest
May 18, 1998
From: WAGNER, GERALD; FREY, HELMUT
To: SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG AG
Reel/Frame 009177/0627 →
Assignment of Assignor's Interest
Jun 8, 1998
From: PIRKER, WILLIBALD
To: SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG AG
Reel/Frame 009237/0882 →
Assignment of Assignor's Interest
Jun 17, 1998
From: SUMNITSCH, FRANZ
To: SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG AG
Reel/Frame 009265/0189 →
Assignment of Assignor's Interest
Jul 2, 1998
From: ELSON, ROBERT J.; SCHIPPER, JOHN F.
To: FERRELL, GARY W.
Reel/Frame 009331/0379 →
Assignment of Assignor's Interest
Aug 22, 1998
From: SPENCER, THOMAS D.; CARTER, ROB E.
To: FARRELL, GARY W.
Reel/Frame 009417/0528 →
Assignment of Assignor's Interest
Jan 25, 1999
From: PIRKER, WILLIBALD
To: SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG AG
Reel/Frame 009715/0475 →
Assignment of Assignor's Interest
Oct 16, 2000
From: SPENCER, THOMAS D.
To: FERRELL, GARY W.
Reel/Frame 011190/0434 →
Assignment of Assignor's Interest
Jan 23, 2001
From: FERRELL, GARY W.
To: L-TECH CORPORATION
Reel/Frame 011467/0565 →
Assignment of Assignor's Interest
Jan 23, 2001
From: FERRELL, GARY W.
To: L-TECH CORPORATION
Reel/Frame 011467/0550 →
Assignment of Assignor's Interest
Jan 23, 2001
From: FERRELL, GARY W.
To: L-TECH CORPORATION
Reel/Frame 011467/0553 →
Assignment of Assignor's Interest
Jan 23, 2001
From: FERRELL, GARY W.
To: L-TECH CORPORATION
Reel/Frame 011467/0556 →
Assignment of Assignor's Interest
Jan 23, 2001
From: FERRELL, GARY W.
To: L-TECH CORPORATION
Reel/Frame 011467/0559 →
Assignment of Assignor's Interest
Jan 23, 2001
From: FERRELL, GARY W.
To: L-TECH CORPORATION
Reel/Frame 011467/0562 →
Assignment of Assignor's Interest
Jan 23, 2001
From: FERRELL, GARY W.
To: L-TECH CORPORATION
Reel/Frame 011467/0568 →
Assignment of Assignor's Interest
Jan 23, 2001
From: FERRELL, GARY W.
To: L-TECH CORPORATION
Reel/Frame 011467/0571 →
Assignment of Assignor's Interest
Jan 23, 2001
From: FERRELL, GARY W.
To: L-TECH CORPORATION
Reel/Frame 011470/0720 →
Assignment of Assignor's Interest
May 1, 2001
From: LINDNER, JOHANNES
To: SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG AG
Reel/Frame 011771/0864 →
Assignment of Assignor's Interest
Oct 31, 2001
From: ENGESSER, PHILIPP
To: SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG AG
Reel/Frame 012294/0198 →
Change of Name
Jul 22, 2002
From: SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG AG
To: SEZ AG
Reel/Frame 013101/0335 →
Change of Name
Jul 24, 2002
From: SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG AG
To: SEZ AG
Reel/Frame 013117/0534 →