Compositons and processes for immersion lithography
View Patent ↗New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprises two or more distinct materials that can be substantially non-mixable with a resin component of the resist. Particularly preferred photoresists of the invention can exhibit reduced leaching of resist materials into an immersion fluid contacting the resist layer during immersion lithography processing.
1. A method for processing a photoresist composition, comprising:
(a) applying on a substrate a photoresist composition comprising:
(i) a first resin that comprises photoacid-labile groups,
(ii) a photoactive component, and
(iii) a second resin and a third resin where the second and third resins are substantially non-mixable with the first resin, and the first resin, second resin and third resin are each distinct from each other; and
(b) immersion exposing the photoresist layer to radiation activating for the photoresist composition.
2. The method of claim 1 wherein the second and third resins have differing surface energies.
3. The method of claim 1 wherein the second and third resins have differing relative hydrophobicities.
4. The method of claim 1 wherein the second and third resins comprise (i) a top material and (ii) and an intermediate material, and the top material and intermediate material have greater hydrophobicity relative to the first resin.
5. The method of claim 1 wherein the second and third resins comprise aqueous base-solubilizing groups.
6. The method of claim 1 wherein the second and third resins comprise photoacid-labile groups.
7. The method of claim 1 wherein the second and third resins comprise fluorine substitution.
8. The method of claim 6 wherein the second and third resins comprise fluorine substitution.
9. The method of claim 6 wherein the second and third resins comprise Si substitution.
10. The method of claim 1 wherein the second and third resins comprise (i) a top material and (ii) and an intermediate material, and the applied photoresist composition forms a layer with a substantial portion of the first resin closer to the substrate than a substantial portion of the second resin, and a substantial portion of the second resin is closer to the substrate than the third resin.