Precise positioning system for dual stage switching exposure
View Patent ↗A precise positioning system for dual stage switching exposure, which includes a base, a first wafer stage positioning unit disposed on the base for a pre-processing workstation, and a second wafer stage positioning unit for an exposure workstation. Each of the wafer stage positioning units includes a wafer stage, a motion positioning detector, an X-direction guide bar, and a Y-direction guide bar. The pre-processing workstation and the exposure workstation both have two X-direction guide bars positioned on and movable along the Y-direction guide bars. The X-direction guide bars of adjacent workstations can be connected to each other.
1. A precise positioning system for dual stage switching exposure, comprising:
a base;
two wafer stage positioning units disposed on the base, and each including a first X-direction guide bar and a second X-direction guide bar that are individually movable along a Y direction perpendicular to the X direction, the first and second X-direction guide bars of one wafer stage positioning unit being respectively alignable with the first and second X-direction guide bars of the other wafer stage positioning unit;
a first wafer stage placed on the first X-direction guide bar of one wafer stage positioning unit, and, when the first X-direction guide bars of the two wafer stage positioning units are aligned, being movable to the other wafer stage positioning unit along the aligned first X-direction guide bars; and
a second wafer stage placed on the second X-direction guide bar of the other wafer stage positioning unit, and, when the second X-direction guide bars of the two wafer stage positioning units are aligned, being movable to the one wafer stage positioning unit along the aligned second X-direction guide bars.
2. A precise positioning system as claimed in claim 1 , characterized in that a cable stage is connected to each of said wafer stages, said cable stages moving on opposite sides of said base via cable stage guide bars of said system.
3. A precise positioning system as claimed in claim 1 , characterized in that
said first and second wafer stages are respectively disposed in noncontact association with said first and second X-direction guide bars, thereby enabling frictionless relative motion therebetween; and
said first and second X-direction guide bars are frictionlessly movable along the Y direction.
4. A precise positioning system as claimed in claim 3 , characterized in that said noncontact association can be achieved through gas levitation bearing or magnetic levitation bearing.
5. A precise positioning system as claimed in claim 1 , characterized in that each of said wafer stage positioning units has two Y-direction guide bars, said Y-direction guide bars and either of said X-direction guide bars of the corresponding workstation forming an “H” shaped structure.
6. A precise positioning system as claimed in claim 1 , characterized in that said wafer stage positioning units each include a motion positioning detector, the motion positioning detectors being laser interferometers and linear gratings.
7. A precise positioning system as claimed in claim 6 , characterized in that said laser interferometers are respectively positioned on adjacent sides of each wafer stage positioning unit.
8. A precise positioning system as claimed in claim 6 , characterized in that
each of said wafer stage positioning units has a Y-direction guide bar; and
said linear gratings are positioned on both of the X-direction guide bars and the Y-direction guide bar.