Patent Assignment
Reel/Frame 048745/0860
Corrective Assignment to Correct the Application Serial Number Previously Recorded at Reel: 043517 Frame: 0989. Assignor(S) Hereby Confirms the Assignment.
Recorded: 2019-03-29
Pages: 7
Assignor
SHANGHAI MICRO ELECTRONICS EQUPIMENT CO., LTD.
Executed: 2017-01-20
Assignee
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
1525 ZHANGDONG ROAD, ZHANGJIANG HIGH-TECH PARK, SHANGHAI, 201203, CHINA
Covered Properties
(30)
Method for in-Situ Aberration Measurement of Optical Imaging System in Lithographic Tools
Precise Positioning System for Dual Stage Switching Exposure
Large-Field Unit-Magnification Projection Optical System
Immersion Flow Field Maintenance System for an Immersion Lithography Machine
Dual Stage Positioning and Switching System
Large Field Projection Objective for Lithography
Application:
13/976,353 →
Publication:
US 2013/0293859
Backside Alignment Apparatus and Method
Projection Objective Lens System
Split Type Aerostatic Bearing
Method for Measuring Distortion of Projection Objective
Method for Measuring and Calibrating Centroid of Coarse Stage of Photolithography Tool
Interference Exposure Device and Method
Laser Annealing Apparatus and Laser Annealing Method
Linear Motor and Stage Apparatus
Off-Axis Alignment System and Alignment Method
Balance Mass System Shared by Workpiece Table and Mask Table, and Lithography Machine
Warped Silicon-Chip Adsorption Device and Adsorption Method Thereof
Application:
14/655,465 →
Publication:
US 2015/0357217
Magnetic Alignment System and Alignment Method Therefor
Reticle Shape Regulation Device and Method, and Exposure Apparatus Using Same
Halbach Array and Magnetic Suspension Damper Using Same
Flat Voice Coil Motor
Application:
15/038,992 →
Publication:
US 2016/0380524
Silicon Wafer Edge Protection Device with Collision Protection Function
Reticle Shape Correction Apparatus and Photolithography Tool Using Same
Focusing Leveling Device
Silicon Wafer Pre-alignment Device and Method Therefor
Lithography Machine Workpiece Table and Vertical Position Initialization Method Thereof
Laser Annealing Device
Application:
15/323,544 →
Publication:
US 2017/0144251
Apparatus and Method for 3D Surface Inspection
Application:
15/403,581 →
Publication:
US 2018/0195971
Exposure Device and Out-of-Focus and Tilt Error Compensation Method
Adjusting Device and Adjusting Method for Exposure Device
Related Assignments
(20)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 29, 2008
From: WANG, FAN; MA, MINGYING; WANG, XIANGZHAO
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
Reel/Frame 021600/0830 →
Assignment of Assignor's Interest
Oct 30, 2008
From: LI, YINGSHENG; LI, XIAOPING; YANG, ZHIYONG; GUAN, JUN
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
Reel/Frame 021765/0056 →
Assignment of Assignor's Interest
Nov 28, 2008
From: LI, TIEJUN; HUANG, LING; WEI, JUN
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
Reel/Frame 021899/0001 →
Assignment of Assignor's Interest
Dec 10, 2008
From: YANG, ZHIYONG
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
Reel/Frame 021955/0560 →
Assignment of Assignor's Interest
Apr 7, 2009
From: LI, XIAOPING; LI, YINGSHENG
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
Reel/Frame 022514/0633 →
Assignment of Assignor's Interest
May 31, 2013
From: ZHU, LIRONG
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
Reel/Frame 030527/0121 →
Assignment of Assignor's Interest
Jun 27, 2013
From: WU, HENG; HUANG, LING; LIU, GUOGAN
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
Reel/Frame 030697/0900 →
Assignment of Assignor's Interest
Jun 27, 2013
From: XU, BING; CHEN, YUEFEI; JIA, XIANG; YANG, XIAOQING
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
Reel/Frame 030697/0769 →
Assignment of Assignor's Interest
Sep 6, 2013
From: LI, JINCHUN; FANG, JIE; ZHENG, YEQIN; XIA, HAI
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
Reel/Frame 031149/0879 →
Assignment of Assignor's Interest
Sep 10, 2013
From: FANG, LI; SUN, GANG; MIN, JINHUA; ZHANG, JUN
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
Reel/Frame 031200/0321 →
Assignment of Assignor's Interest
Nov 21, 2013
From: WU, LIWEI; DONG, JUNQING
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
Reel/Frame 031693/0605 →
Assignment of Assignor's Interest
Feb 19, 2014
From: XU, QIXIN; WANG, FAN
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
Reel/Frame 032243/0382 →
Assignment of Assignor's Interest
Sep 15, 2014
From: ZHANG, JUN; LI, ZHIDAN; LI, ZHE
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
Reel/Frame 033743/0334 →
Assignment of Assignor's Interest
Dec 19, 2014
From: WU, LIWEI; CHEN, QINGSHENG; YAN, LANZHOU
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD
Reel/Frame 034560/0830 →
Assignment of Assignor's Interest
Apr 8, 2015
From: ZHANG, PENGLI; XU, WEN; WANG, FAN
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
Reel/Frame 035360/0752 →
Assignment of Assignor's Interest
Apr 22, 2015
From: WANG, TIANMING
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
Reel/Frame 035474/0236 →
Assignment of Assignor's Interest
Jul 2, 2015
From: WANG, XINXIN; JIANG, XUCHU; XU, TAO; ZHU, WENJING
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD
Reel/Frame 036052/0471 →
Assignment of Assignor's Interest
Jul 7, 2015
From: ZHANG, LIN; ZHANG, XIAOWEN; GUO, LIN; CHEN, JUN
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD
Reel/Frame 036010/0308 →
Change of Name
Jun 30, 2017
From: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
To: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Reel/Frame 043517/0989 →
Assignment of Assignor's Interest
Sep 17, 2025
From: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
To: AMIES TECHNOLOGY CO., LTD.
Reel/Frame 072912/0466 →