Split type aerostatic bearing
A split-type aerostatic bearing for supporting a moving table to move frictionlessly on a platform ( 4 ) is disclosed. The split-type aerostatic bearing includes an aerostatic bearing plate ( 6 ), air floating elements ( 2 ′a, 2 ′b, 2 ′c, 2 ′d ) disposed on a bottom of the aerostatic bearing plate ( 6 ) and a vacuum pre-tightening structure ( 7 ) disposed on the aerostatic bearing plate ( 6 ). The vacuum pre-tightening structure ( 7 ) is coupled to the aerostatic bearing plate ( 6 ) in a split fashion. Separation of the air floating elements ( 2 ′a, 2 ′b, 2 ′c, 2 ′d ) from the vacuum pre-tightening structure ( 7 ) prevents the aerostatic bearing plate ( 6 ) from bending under a vacuum pre-tightening force, and hence will not affect the air floating area.
1. An aerostatic bearing for supporting a moving table to move substantially frictionlessly on a platform, the aerostatic bearing comprising:
an aerostatic bearing plate;
air floating elements disposed on a bottom of the aerostatic bearing plate;
a vacuum pre-tightening structure disposed on the aerostatic bearing plate, wherein the vacuum pre-tightening structure is detachably coupled to the aerostatic bearing plate, each coupling point between the vacuum pre-tightening structure and the aerostatic bearing plate is aligned on a same normal line of the platform with a center of a corresponding one of the air floating elements.
2. The aerostatic bearing according to claim 1 , wherein a bottom surface of the vacuum pre-tightening structure is at a higher level than a bottom surface of the aerostatic bearing plate.
3. The aerostatic bearing according to claim 1 , wherein the vacuum pre-tightening structure includes a vacuum plate and a vacuum plate fixing frame,
wherein the vacuum plate is disposed on a bottom of the vacuum plate fixing frame,
wherein the vacuum plate fixing frame is coupled to the aerostatic bearing plate, and
wherein a vacuum chamber is formed between the vacuum plate and the aerostatic bearing plate.
4. The aerostatic bearing according to claim 3 , wherein a sealing ring for sealing the vacuum chamber is disposed between the vacuum plate and the aerostatic bearing plate.
5. The aerostatic bearing according to claim 4 , wherein the vacuum plate fixing frame is coupled to the aerostatic bearing plate by support adjusting screws which adjust a distance between the vacuum plate and the aerostatic bearing plate and thereby drive the vacuum plate to squeeze the sealing ring.
6. The aerostatic bearing according to claim 3 , wherein the vacuum pre-tightening structure further includes a capping plate disposed on a top of the vacuum plate fixing frame.
7. The aerostatic bearing according to claim 1 , wherein flexible reeds for horizontally positioning the vacuum pre-tightening structure are disposed at edges of the vacuum pre-tightening structure.
8. The aerostatic bearing according to claim 7 , wherein each of the flexible reeds includes a body, a first vertical reed and a second vertical reed,
wherein the first vertical reed and the second vertical reed are arranged on a same side of the body, the first vertical reed having one end coupled to the body and the other end coupled to one end of the second vertical reed, and
wherein the body is coupled to the aerostatic bearing plate, and both the first vertical reed and the second vertical reed are coupled to the vacuum pre-tightening structure.
9. The aerostatic bearing according to claim 1 , wherein each of the air floating elements is disposed at a corresponding one of four corners of the bottom of the aerostatic bearing plate.
10. The aerostatic bearing according to claim 9 , wherein all four corners of the vacuum pre-tightening structure are coupled to the aerostatic bearing plate, and wherein a coupling point between each corner and the aerostatic bearing plate is aligned on a same normal line of the platform with a center of a corresponding one of the air floating elements.