Semiconductor laser device
View Patent ↗In a multi-beam semiconductor laser device, relative difference in shear strain applied to each of light-emitting portions of a laser chip mounted on a submount is suppressed, thereby reducing relative difference in polarization angle. A semiconductor laser element array mounted on a submount has a structure in which a semiconductor layer having two ridge portions is stacked on a substrate, and Au plating layers are formed on the surfaces of p type electrodes formed on the ridge portions. In each of the ridge portions, a central position of the Au plating layer in a width direction is intentionally displaced with respect to a central position of the underlying light-emitting portion in a width direction, so that shear strain is applied to each of the light-emitting portions at a stage before the semiconductor laser element array is mounted on the submount.
1. A semiconductor laser device comprising:
a semiconductor laser element array with a multi-beam structure including a semiconductor substrate, a cathode electrode of a first conductivity type formed on a first surface of the semiconductor substrate, a semiconductor layer formed on a second surface of the semiconductor substrate and having a plurality of light-emitting portions therein, anode electrodes of a second conductivity type formed above each of the plurality of light-emitting portions, and metal layers formed on each surface of the anode electrodes,
wherein each of the metal layers is bonded to a first surface of a submount via a bonding material, thereby mounting the semiconductor laser element array on the submount, and
central positions of the metal layers in a width direction are intentionally displaced with respect to central positions of the underlying light-emitting portions in a width direction.
2. The semiconductor laser device according to claim 1 ,
wherein a linear expansion coefficient of the semiconductor substrate is larger than a linear expansion coefficient of the submount, and central positions of the metal layers in a width direction are intentionally displaced with respect to central positions of the light-emitting portions in a width direction so that plus shear strain is applied to the light-emitting portions located on a left side with respect to a central position of the semiconductor substrate in a width direction and minus shear strain is applied to the light emitting portions located on a right side at a stage before the semiconductor laser element array is mounted on the submount.
3. The semiconductor laser device according to claim 2 ,
wherein the semiconductor substrate is made of GaAs, and the submount is made of SiC or AlN.
4. The semiconductor laser device according to claim 1 ,
wherein a linear expansion coefficient of the semiconductor substrate is smaller than a linear expansion coefficient of the submount, and central positions of the metal layers in a width direction are intentionally displaced with respect to central positions of the light-emitting portions in a width direction so that minus shear strain is applied to the light-emitting portions located on a left side with respect to a central position of the semiconductor substrate in a width direction and plus shear strain is applied to the light emitting portions located on a right side at a stage before the semiconductor laser element array is mounted on the submount.
5. The semiconductor laser device according to claim 4 ,
wherein the semiconductor substrate is made of GaAs, and the submount is made of CuW.
6. The semiconductor laser device according to claim 1 ,
wherein, assuming that a width of the metal layer is Wa and a width of the light emitting portion is Wb, an upper limit of the displacement is (Wa−4Wb)/2.
7. The semiconductor laser device according to claim 1 ,
wherein, when the number of beams is four or more, a central position of the metal layer in a width direction located at a position farther from a center of the semiconductor substrate in a width direction is more largely displaced with respect to a central position of the underlying light-emitting portion in a width direction.
8. The semiconductor laser device according to claim 1 ,
wherein, when the number of beams is odd, the amount of displacement between a central position of the metal layer in a width direction located at a center of the semiconductor substrate in a width direction and a central position of the underlying light-emitting portion in a width direction is 0.
9. The semiconductor laser device according to claim 1 ,
wherein a pseudo laser element which does not have a light-emitting portion is provided outside a region where the plurality of light-emitting portions and the plurality of metal layers are formed.
10. The semiconductor laser device according to claim 1 ,
wherein a heat sink is bonded to a second surface of the submount.
11. The semiconductor laser device according to claim 1 ,
wherein the metal layer is an Au plating layer.