Reflective-type mask
View Patent ↗A reflective-type mask having a main surface including a pattern region in the main surface, the pattern region including a multilayer reflective film which reflects the exposure light and a first absorber pattern on the multilayer reflective film, the first absorber pattern including a pattern which absorbs the exposure light and corresponds to a pattern to be formed on a wafer, a light shielding region in the main surface for preventing a region on the wafer excluding a predetermined region from being irradiated with the exposure light when the main surface is irradiated with the exposure light for transferring the first absorber pattern to the predetermined region, the light shielding region including a second absorber pattern having a lower reflectivity to the exposure light than the first absorber pattern and being provided in a position differing from a position in which the first absorber pattern is provided.
1. A reflective-type mask including a main surface to be irradiated with exposure light, comprising:
a pattern region provided in the main surface, the pattern region comprising a multilayer reflective film configured to reflect the exposure light and a first absorber pattern provided on the multilayer reflective film, the first absorber pattern including a pattern which is configured to absorb the exposure light and corresponds to a pattern to be formed on a wafer; and
a light shielding region provided in the main surface and configured to prevent a region on the wafer excluding a predetermined region from being irradiated with the exposure light when the main surface is irradiated with the exposure light for transferring the first absorber pattern to the predetermined region on the wafer, the light shielding region comprising a second absorber pattern, the second absorber pattern having a lower reflectivity to the exposure light than the first absorber pattern and being provided in a position differing from a position in which the first absorber pattern is provided,
wherein the multilayer reflective film is formed on a substrate whose reflectivity to the exposure light is lower than that of the first absorber pattern, and the second absorber pattern comprises an exposed surface of the substrate.
2. The reflective-type mask according to claim 1 , wherein the light shielding region is provided along a periphery of the pattern region or in a region corresponding to a dicing line on the wafer.
3. The reflective-type mask according to claim 1 , wherein the exposure light is EUV light.
4. The reflective-type mask according to claim 1 , wherein the first absorber pattern includes TaN as material.
5. The reflective-type mask according to claim 1 , further comprising an antireflective film which is provided on a surface of the first absorption pattern and is configured to prevent light used for mask inspection from reflecting.
6. The reflective-type mask according to claim 5 , wherein the antireflective film includes Ta2 05 as material.
7. The reflective-type mask according to claim 5 , further comprising a buffer film provided under the first absorption pattern.
8. The reflective-type mask according to claim 7 , wherein the buffer film includes Cr as material.
9. The reflective-type mask according to claim 1 , wherein the main surface is a surface of quartz substrate.
10. The reflective-type mask according to claim 1 , wherein the quartz substrate includes titanium.