Increasing the spatial resolution of dosimetry sensors
View Patent ↗A two-dimensional array of memory cells may be used to implement a spatial dosimeter. The two-dimensional array of cells may be implemented by an integrated circuit memory. Because of the relatively small size of the integrated circuit memory, the resolution of the resulting array may be less than 100 nanometers. The change in threshold voltage of each of the cells, as a result of radiation exposure, may be used to calculate the dose seen at each cell, allowing dose profiles in two dimensions with sub-micrometer resolution.
1. A method comprising:
programming each of the plurality of cells;
measuring a pre-exposure threshold voltage of each of the plurality of cells;
exposing the plurality of cells to ionizing radiation;
measuring a post-exposure threshold voltage of each of the plurality of cells; and
determining a radiation dose of each of the plurality of cells based, at least in part, on the respective post-exposure threshold voltages of each of the plurality of cells and a predetermined average value for an intrinsic threshold voltage of the plurality of cells.
2. The method of claim 1 , wherein the plurality of cells comprises a two-dimensional array of cells.
3. The method of claim 1 , further comprising determining dose in two dimensions with better than 100 nanometer resolution.
4. The method of claim 1 , further comprising correlating an address of each of the plurality of cells to a respective position in a two-dimensional array.
5. The method of claim 1 , wherein said determining a radiation dose at each of the plurality of said cells comprises performing an analog reading on each of the plurality of cells.
6. The method of claim wherein said determining a radiation dose at each of the plurality of cells includes measuring the threshold voltages of an array of cells of a flash memory with a test mode.
7. A computer readable medium storing instructions to enable a processor-based device to:
determine a change in threshold voltage for each of a plurality of cells in a two-dimensional array of an integrated memory as a result of exposure of the plurality of cells to ionizing radiation,
wherein the change in threshold voltage for each of the plurality of cells is based on a respective intrinsic threshold voltage, a respective pre-exposure threshold voltage, and a respective post-exposure threshold voltage;
correlating a position of each cell in said two-dimensional array to as respective address;
calculating a dose of the ionizing radiation at the position of each of said cells in said two-dimensional array, the dose based, at least in part, on the respective post-exposure threshold voltages of each of the plurality of cells and a predetermined average value for an intrinsic threshold voltage.
8. The medium of claim 7 , further including determining a spatial dose with a resolution of less than 100 nanometers.
9. The medium of claim 7 , including programming the cells before exposing the cells to ionizing radiation.
10. A spatial dosimeter comprising:
an array of memory cells arranged in two dimensions; and
a control circuit coupled to the array of memory cells and configured to determine a radiation dose received by each of said cells based on a change in threshold voltage for each of the memory cells after exposure to ionizing radiation and a predetermined average value for an intrinsic threshold voltage,
wherein the threshold voltage for each of the memory cells is determined using an analog reading.
11. The spatial dosimeter of claim 10 , wherein the spatial dosimeter has a spatial resolution of less than 100 nanometers.
12. The spatial dosimeter of claim 10 , wherein the control circuit is further configured to convert between cell addresses and cell physical positions.
13. The spatial dosimeter of claim 10 , further comprising an interface coupled to the array of memory cells and the control circuit and configured to provide a measurement of the threshold voltages of said cells.
14. The spatial dosimeter pf claim 13 , wherein the interface is configured to perform each analog reading.
15. The spatial dosimeter of claim 14 , wherein the interface is configured to perform each analog reading in a test mode.
16. The spatial dosimeter of claim 15 , wherein the control circuit is configured to place the interface in the test mode.