Apparatus for producing single crystal silicon
An apparatus for producing single crystal silicon comprising: an induction heating coil that is disposed around the polycrystalline silicon rod for fusing the polycrystalline silicon rod; an exothermic ring that has a quartz-coated member covering the conductive member; a support member that supports the exothermic ring and passes through a wall of the housing in a rotatable manner; an operating device that rotates the support member and reciprocates the exothermic ring between a heating position where the exothermic ring is positioned close to the induction heating coil and a stand-by position where the exothermic ring is receded from the heating position; a sealing member that is provided between the wall of the housing and the support member and maintains the hermitic therebetween; and a cooling flow path that is formed in the support member and flows a cooling medium.
1. An apparatus for producing single crystal silicon comprising:
a housing;
a seed crystal holder that holds a seed crystal in the housing;
a polycrystal holder that holds a polycrystalline silicon rod in the housing to place one end of the polycrystalline silicon rod opposite to one end of the seed crystal held by the seed crystal holder;
an induction heating coil that is disposed around the polycrystalline silicon rod for fusing the polycrystalline silicon rod, connecting the one end of the polycrystalline silicon rod to the one end of the seed crystal, and single-crystallizing the polycrystalline silicon rod connected to the seed crystal;
an exothermic ring that has a conductive member capable of undergoing induction heating by the induction heating coil and a quartz-coated member covering the conductive member;
a support member that supports the exothermic ring and passes through a wall of the housing in a rotatable manner;
an operating device that rotates the support member and reciprocates the exothermic ring between:
i) a heating position where the exothermic ring is positioned close to the induction heating coil in between the seed crystal holder and the polycrystal holder, and
ii) a stand-by position where the exothermic ring is receded from the heating position;
a sealing member that is provided between the wall of the housing and the support member and maintains the hermetic therebetween; and
a cooling flow path that is formed in the support member and flows a cooling medium.
2. An apparatus for producing single crystal silicon according to claim 1 , wherein the support member has a double tube comprising an outer tube and an inner tube, and the cooling flow path is designed so that cooling media is supplied to ether the inner tube or the outer tube expelled from the tube which is not used for supply.
3. An apparatus for producing single crystal silicon according to claim 1 , wherein the conductive member of the exothermic ring is formed of carbon.
4. An apparatus for producing single crystal silicon according to claim 1 , wherein a space is formed between the conductive member and the quartz-coated member, and the space is evacuated in a vacuum state.
5. An apparatus for producing single crystal silicon according to claim 1 , wherein the exothermic ring has a cutout in a circumferential periphery thereof so that the polycrystalline silicon rod can pass through the cutout when the exothermic ring is moved between the heating position and the stand-by position by the operating device.