Controlling the circuitry and memory array relative height in a phase change memory feol process flow
View Patent ↗A CMOS logic portion embedded with a PCM portion is recessed by a gate structure height as measured by a thickness of a gate oxide and a polysilicon gate to provide planarity of the CMOS logic portion with the PCM portion is described.
1. A Phase Change Memory (PCM) device, comprising:
a substrate;
an array portion formed on the substrate, the array portion including memory storage and junction devices; and
a circuitry portion including complementary metal-oxide semiconductor (CMOS) combinational logic devices, the circuitry portion being at least partially recessed into the substrate.
2. The PCM device of claim 1 , wherein the circuitry portion includes a gate oxide and a polysilicon gate, the gate oxide and the polysilicon gate having a thickness that substantially matches an amount that the circuitry portion is recessed into the substrate.
3. The PCM device of claim 1 wherein a height that the circuitry portion is recessed below a surface of the array portion provides sufficient planarity to further allow metal layers and contacts to interconnect active components.
4. The PCM device of claim 1 wherein the junction devices are a Bipolar Junction Transistor (BJT) array having a top approximately at a same level as a top of the CMOS circuitry at an end of a front end process flow.
5. A device, comprising:
a selector junction device formed on a substrate, the selector junction device being coupled to a phase change material in a Phase Change Memory (PCM); and
a complementary metal-oxide semiconductor (CMOS) section embedded with the PCM, the CMOS section being recessed into the substrate by a height that substantially matches a height of a gate oxide and a polysilicon gate to provide planarity of an uppermost portion of the CMOS section with an uppermost portion of the PCM.
6. The device of claim 5 , wherein the CMOS section includes a multiple core processor section.
7. The device of claim 5 wherein the selector junction device is a Bipolar Junction Transistor (BJT) having an emitter coupled to the phase change material.
8. The device of claim 7 wherein an end portion of a storage array that includes the BJT and phase change material and an end portion of the CMOS section are fabricated at approximately a same level at an end of a front end process flow to provide planarity prior to a Back End Of Line (BEOL) integration.
9. A wireless communications device, comprising:
a transceiver to receive a modulated signal;
a Phase-Change Memory (PCM) portion having memory cells with a selector Bipolar Junction Transistor (BJT) device coupled to a phase change material, the PCM portion formed on a surface of a substrate; and
a complementary metal-oxide semiconductor (CMOS) logic portion having multiple processor cores embedded with the PCM portion that is coupled to the transceiver to receive the modulated signal, the CMOS logic portion being recessed below the surface of the substrate by a gate structure height as measured by a thickness of a gate oxide and a polysilicon gate.
10. The wireless communications device of claim 9 , wherein the CMOS portion is recessed to provide substantial planarity of an uppermost surface of the CMOS logic portion with an uppermost surface of the PCM portion prior to any metal layers being formed.
11. The Phase Change Memory (PCM) device of claim 1 , wherein the junction devices comprise selectors to select one or more memory cells within the memory array portion.
12. The Phase Change Memory (PCM) device of claim 1 , wherein the substrate comprises silicon.
13. The device of claim 5 , wherein a depth the CMOS section is recessed below a surface of the substrate is substantially equal to a thickness of a gate oxide and a polysilicon gate to provide planarity for metal layers between the CMOS section and the PCM.