IP Library › Granted Patent US 8,557,711
Granted Patent B2
US 8,557,711 · App. 12/352,020 · Granted Oct 15, 2013

Etching solution composition for metal films

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Quick Facts
Patent No.
US 8,557,711
App. No.
12/352,020
Granted
Oct 15, 2013
Kind
B2
Abstract

The present invention aims to provide an etching solution composition which enables to etch a metal film in a controllable manner, form a desired definite tapered shape, and obtain a smooth surface without causing etching solution exudation trace. Said problems have been solved by the present invention, which is an etching solution composition for etching metal films containing one or more surfactants selected from the group consisting of alkyl sulfate or perfluoroalkenyl phenyl ether sulfonic acid and the salts thereof.

Claims (11)

1. A method for etching a metal film into a tapered shape comprising contacting a resist pattern formed on the metal film with an etching solution composition comprising one or more surfactants selected from the group consisting of alkyl sulfate or perfluoroalkenyl phenyl ether sulfonic acid, and the salts thereof, and further comprising phosphoric acid, nitric acid and acetic acid, wherein the concentration of nitric acid is 15.0% to 30.0% by mass.

2. The method according to claim 1 , wherein the metal film is of aluminum or an aluminum alloy.

3. The method according to claim 1 , wherein the etching rate of the metal film is 367 nm/min, or less.

4. The method according to claim 1 , wherein the shape of the metal film is formed with a taper angle of 19° or less.

5. The method according to claim 2 , wherein the etching rate of the metal film is 367 nm/min. or less.

6. The method according to claim 2 , wherein the shape of the metal film is formed with a taper angle of 19° or less.

7. The method according to claim 1 , wherein the concentration of phosphoric acid is 30.0% to 60.0% by mass.

8. The method according to claim 1 , wherein the concentration of acetic acid is 1.0% to 20.0% by mass.

9. The method according to claim 6 , wherein the concentration of acetic acid is 1.0% to 20.0% by mass.

10. The method according to claim 1 , wherein the concentration of acetic acid is 2.0% to 15.0% by mass.

11. The method according to claim 6 , wherein the concentration of acetic acid is 2.0% to 15.0% by mass.

Assignments (10)
RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT REEL 038620, FRAME 0087 Recorded Jun 22, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
Reel/Frame 064070/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE INCORRECT PATENT NUMBER 5859768 AND TO RECITE COLLATERAL AGENT ROLE OF RECEIVING PARTY IN THE SECURITY INTEREST PREVIOUSLY RECORDED ON REEL 038620 FRAME 0087. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Aug 25, 2016
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 039853/0001 →
CHANGE OF NAME Recorded Jun 23, 2016
From: SANYO SEMICONDUCTOR CO., LTD.
To: SYSTEM SOLUTIONS CO., LTD.
Reel/Frame 038994/0386 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 23, 2016
From: SYSTEM SOLUTIONS CO., LTD.
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 038994/0667 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 22, 2016
From: ON SEMICONDUCTOR NIIGATA CO., LTD.
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 038988/0804 →
SECURITY INTEREST Recorded Apr 15, 2016
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038620/0087 →
CHANGE OF NAME Recorded Feb 23, 2016
From: SANYO SEMICONDUCTOR MANUFACTURING CO., LTD.
To: ON SEMICONDUCTOR NIIGATA CO., LTD.
Reel/Frame 037893/0953 →
CORRECTIVE ASSIGNMENT TO CORRECT THE APPLICATION NUMBERS . PREVIOUSLY RECORDED ON REEL 034285 FRAME 0006. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jan 9, 2015
From: SANYO SEMICONDUCTOR CO., LTD.
To: SYSTEM SOLUTIONS CO., LTD.
Reel/Frame 034745/0927 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 9, 2015
From: FUJIKAWA, KAZUHIRO; TAGO, TSUGUHIRO
To: KANTO KAGUKU KABUSHIKI KAISHA; SANYO ELECTRIC CO., LTD.; NIIGATA SANYO ELECTRONIC CO., LTD.
Reel/Frame 034671/0156 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 17, 2014
From: SANYO ELECTRIC CO., LTD.
To: SYSTEM SOLUTIONS CO., LTD
Reel/Frame 034531/0046 →