Methods for fabricating FinFET structures having different channel lengths
View Patent ↗Methods for fabricating FinFET structures having gate structures of different gate widths are provided. The methods include the formation of sidewall spacers of different thicknesses to define gate structures of the FinFET structures with different gate widths. The width of a sidewall spacer is defined by the height of the structure about which the sidewall spacer is formed, the thickness of the sidewall spacer material layer from which the spacer is formed, and the etch parameters used to etch the sidewall spacer material layer. By forming structures of varying height, forming the sidewall spacer material layer of varying thickness, or a combination of these, sidewall spacers of varying width can be fabricated and subsequently used as an etch mask so that gate structures of varying widths can be formed simultaneously.
1. A method for fabricating semiconductor structures of a first width W 1 and semiconductor structures of a smaller second width W 2 , the method comprising the steps of:
fabricating a first plurality of mandrels on a hard mask layer overlying a structure-forming material layer;
fabricating a second plurality of mandrels on the hard mask layer;
forming a first sidewall spacer-forming material overlying the first plurality of mandrels leaving the second plurality of mandrels exposed, wherein the first sidewall spacer-forming material is deposited to a thickness about equal to a difference between the first width W 1 and the second width W 2 ;
forming a second sidewall spacer-forming material overlying the first sidewall spacer-forming material and the second plurality of mandrels, wherein the second sidewall spacer-forming material is deposited to a thickness about equal to the first width W 1 ;
anisotropically etching the first sidewall spacer-forming material and the second sidewall spacer-forming material to form first sidewall spacers about sidewalls of each of the first plurality of mandrels and second sidewall spacers about sidewalls of each of the second plurality of mandrels, the first sidewall spacers having a base width of about equal to the first width W 1 and the second sidewall spacers having a base width of about equal to the second width W 2 ;
removing the first plurality of mandrels and the second plurality of mandrels;
etching the hard mask layer using the first sidewall spacers and the second sidewall spacers as an etch mask; and
etching the structure-forming material layer using the etched hard mask layer as an etch mask.
2. The method of claim 1 , further comprising the steps of:
fabricating a third plurality of mandrels on the hard mask layer; and
forming a third sidewall spacer-forming material overlying the third plurality of mandrels leaving the first plurality of mandrels and the second plurality of mandrels exposed, wherein the step of forming the third sidewall spacer-forming material is performed before the step of forming a first sidewall spacer-forming material;
wherein the step of forming a first sidewall spacer-forming material comprises forming the first sidewall spacer-forming material overlying the third sidewall spacer-forming material and the first plurality of mandrels; and
wherein the step of anisotropically etching comprises anisotropically etching the third sidewall spacer-forming material, the second sidewall spacer-forming material, and the first sidewall spacer-forming material to form third sidewall spacers having a base width of about equal to a third width W 3 of third structures.
3. The method of claim 1 , wherein the step of fabricating a first plurality of mandrels and the step of fabricating a second plurality of mandrels comprise the steps of:
depositing a mandrel-forming material on the hard mask layer;
forming a first patterned mask overlying a first portion of the mandrel-forming material;
etching the first portion of the mandrel-forming material to form the first plurality of mandrels or the second plurality of mandrels;
removing the first patterned mask;
forming a second patterned mask overlying a second portion of the mandrel-forming material; and
etching the second portion of the mandrel-forming material to form the other of the first plurality of mandrels or the second plurality of mandrels.
4. The method of claim 1 , wherein the step of fabricating the first plurality of mandrels and the step of fabricating a second plurality of mandrels comprise the steps of:
depositing a first mandrel-forming material on the hard mask layer;
depositing a second mandrel-forming material overlying the first mandrel-forming material;
removing the second mandrel-forming material from overlying a portion of the first mandrel-forming material; and
etching the first mandrel-forming material and the second mandrel-forming material to form the first plurality of mandrels and the second plurality of mandrels.
5. The method of claim 4 , further comprising the steps of:
forming an etch stop layer overlying the first mandrel-forming material before the step of depositing a second mandrel-forming material; and
removing the etch stop layer overlying the portion of the first mandrel-forming material after the step of removing the second mandrel-forming material;
wherein the step of etching the first mandrel-forming material and the second mandrel-forming material comprises etching the first and second mandrel-forming materials and the etch stop layer.
6. The method of claim 1 , wherein the step of forming a first sidewall spacer-forming material overlying the first plurality of mandrels comprises the steps of:
depositing the first sidewall spacer-forming material overlying the first plurality of mandrels and the second plurality of mandrels; and
removing the first sidewall spacer-forming material from the second plurality of mandrels.
7. The method of claim 1 , further comprising the step of removing the first sidewall spacers and the second sidewall spacers after the step of etching the hard mask layer and before the step of etching the structure-forming material layer.
8. The method of claim 1 , wherein the step of fabricating a first plurality of mandrels comprises fabricating the first plurality of mandrels having a pitch that is twice the pitch of a plurality of first structures.
9. The method of claim 8 , wherein the step of fabricating a second plurality of mandrels comprises fabricating the second plurality of mandrels having a pitch that is twice the pitch of a plurality of second structures.