Diode with shortened reverse recovery time without reducing impurity concentration
View Patent ↗In a pn junction diode having a conductivity modulating element provided on a first principal surface of a semiconductor substrate, when an impurity concentration of a p type impurity region is lowered to shorten a reverse recovery time, hole injection is suppressed, thereby causing a problem that a forward voltage value is increased at a certain current point. Moreover, introduction of a life time killer to shorten the reverse recovery time leads to a problem of increased leak current. On an n− type semiconductor layer that is a single crystal silicon layer, a p type polycrystalline silicon layer (p type polysilicon layer) is provided. Since the polysilicon layer has more grain boundaries than the single crystal silicon layer, an amount of holes injected into the n− type semiconductor layer from the p type polysilicon layer in forward voltage application can be suppressed. Moreover, a natural oxide film formed between the n− type semiconductor layer and the p type polysilicon layer in formation of the p type polysilicon layer can also reduce the amount of holes injected into the n− type semiconductor layer. Thus, a time to extract the holes in reverse voltage application, that is, a reverse recovery time can be shortened without using a life time killer.
1. A diode comprising:
an n type semiconductor silicon substrate having a top surface and a bottom surface;
an n type semiconductor layer disposed on the top surface of the n type semiconductor silicon substrate;
a p type polycrystalline silicon layer disposed on the n type semiconductor layer;
a first electrode disposed on the p type polycrystalline silicon layer so as to be in contact with the p type polycrystalline silicon layer;
a second electrode disposed on the bottom surface of the n type semiconductor substrate;
an oxide film disposed between the n type semiconductor layer and the p type polycrystalline silicon layer so that the oxide film is in contact with the n type semiconductor layer and the entire bottom surface of the p type polycrystalline layer; and
a high-concentration p type impurity region formed in a portion of the n type semiconductor layer that is below an edge portion of the p type polycrystalline silicon layer so as to have an impurity concentration higher than the p type polycrystalline silicon layer,
wherein the oxide film is in contact with the high-concentration p type impurity region.
2. The diode of claim 1 , wherein a thickness of the p type polycrystalline silicon layer is about 10 μm.
3. The diode of claim 1 , wherein an impurity concentration of the p type polycrystalline silicon layer is about 1×10 17 cm −3 .
4. The diode of claim 1 , wherein a thickness of the oxide film is about 1 Å to 100 Å.
5. The diode of claim 1 , wherein the p type polycrystalline silicon layer covers the entire portion of the n type semiconductor layer inside the high-concentration p type impurity region.
6. A diode comprising:
an n type semiconductor silicon substrate having a top surface and a bottom surface;
an n type semiconductor layer disposed on the top surface of the n type semiconductor silicon substrate;
a p type polycrystalline silicon layer disposed on the n type semiconductor layer;
a first electrode disposed on the p type polycrystalline silicon layer so as to be in contact with the p type polycrystalline silicon layer;
a second electrode disposed on the bottom surface of the n type semiconductor substrate;
an oxide film disposed between the n type semiconductor layer and the p type polycrystalline silicon layer so that the oxide film is in contact with the n type semiconductor layer and the entire bottom surface of the p type polycrystalline layer; and
a high-concentration p type impurity region formed in a portion of the n type semiconductor layer that is below an edge portion of the p type polycrystalline silicon layer so as to have an impurity concentration higher than the p type polycrystalline silicon layer, the high-concentration p type impurity region taking a rectangular shape in plan view of the diode.