Insulated gate semiconductor device
View Patent ↗A protection diode group includes multiple protection diodes connected to each other in parallel. A total junction area average of the protection diode group is set to a value large enough to guarantee a desired electrostatic discharge tolerance. By setting the total junction area average to be equal to a junction area average of a conventional structure, the occupation area of the protection diode group on the chip is reduced while the ESD tolerance is made equal to a conventional ESD tolerance.
1. An insulated gate semiconductor device comprising:
a semiconductor substrate;
a plurality of transistor cells of an insulated gate semiconductor element formed in the semiconductor substrate so as to define an operating region in the semiconductor substrate;
a gate pad electrode disposed on the semiconductor substrate and connected to gate electrodes of the transistor cells; and
a group of protection diodes disposed on the semiconductor substrate outside the operating region,
wherein the group of protection diodes comprises a first protection diode and a second protection diode that are connected to each other in parallel,
the first protection diode has a plurality of pn junctions that are formed between a p type semiconductor region and an n type semiconductor region and are concentric closed-loops having a first center, and
the second protection diode has a plurality of pn junctions that are formed between a p type semiconductor region and an n type semiconductor region and are concentric closed-loops having a second center different from the first center.
2. The insulated gate semiconductor device of claim 1 , wherein the group of protection diodes is disposed under the gate pad electrode.
3. The insulated gate semiconductor device of claim 1 , further comprising a conductive layer disposed around the operating region, wherein the first and second protection diodes comprise part of the conductive layer.
4. The insulated gate semiconductor device of claim 1 , wherein the group of protection diodes has protection diodes of a total number M,
each of the M protection diodes has pn junctions of a total number N, and
a total junction area average of the group is determined so as to guarantee a predetermined desired electrostatic discharge tolerance, where the total junction area average is calculated by summing up all junction areas for all M×N pn junctions and dividing the sum by N.
5. The insulated gate semiconductor device of claim 4 , wherein the first and second protection diodes have an identical shape.
6. The insulated gate semiconductor device of claim 5 , wherein the identical shape is a rectangular shape.
7. The insulated gate semiconductor device of claim 5 , wherein the identical shape is a circular shape.
8. The insulated gate semiconductor device of claim 6 , wherein a total number of the protection diodes in the group of protection diodes is four.
9. The insulated gate semiconductor device of claim 1 , wherein an outermost semiconductor region of the first protection diode is continuous with an outermost semiconductor region of the second protection diode.
10. The insulated gate semiconductor device of claim 1 , wherein an outermost semiconductor region of the first protection diode is connected to an outermost semiconductor region of the second protection diode with a metal layer.