Etching liquid composition
View Patent ↗A metal film such as an aluminum film or an aluminum alloy film is etched with good controllability, preventing a resist from bleeding, to have a proper taper configuration and superior flatness. A water solution containing a phosphoric acid, a nitric acid, and an organic acid salt is used as an etching liquid composition used to etch the metal film on a substrate. The organic acid salt is composed of one kind selected from a group consisting of an aliphatic monocarboxylic acid, an aliphatic polycarboxylic acid, an aliphatic oxicarboxylic acid, an aromatic monocarboxylic acid, an aromatic polycarboxylic acid and an aromatic oxycarboxylic acid, and one kind selected from a group consisting of an ammonium salt, an amine salt, a quaternary ammonium salt, and an alkali metal salt. In addition, a concentration of the organic acid salt ranges from 0.1% to 20% by weight. In addition, the etching liquid composition according to the present invention is used when the metal film is formed of aluminum or an aluminum alloy.
1. An etching liquid composition capable of etching a metal film on a substrate, said etching liquid composition being
a water solution consisting of phosphoric acid, nitric acid, and an organic acid salt, wherein:
the concentration of said phosphoric acid in said etching liquid composition is 30% to 80% by weight;
the concentration of said nitric acid in said etching liquid composition is 1% to 40% by weight;
the concentration of said organic acid salt in said etching liquid composition is 0.1% to 20% by weight; and
the total concentration of said phosphoric acid, nitric acid, organic acid salt and water in said etching liquid composition is 100% by weight, wherein
an organic acid of said organic acid salt is one member selected from the group consisting of an aliphatic monocarboxylic acid, an aliphatic polycarboxylic acid, an aliphatic oxycarboxylic acid, an aromatic monocarboxylic acid, an aromatic polycarboxylic acid, and an aromatic oxycarboxylic acid, and wherein a salt of said organic acid salt is one member selected from the group consisting of an ammonium salt, an amine salt, a quaternary ammonium salt, and an alkali metal salt.
2. The etching liquid composition according to claim 1 , capable of etching an aluminum or aluminum alloy.