CRYOTRAP AND VACUUM PROCESSING DEVICE WITH CRYOTRAP
A cryotrap which is set in a vacuum vessel, and has an exhaust panel which condenses and exhausts a gas by cooling, and a cooling stage which is connected to a refrigerator and thereby cooled, includes a cooling storage body fixed on a cooling stage while maintaining thermal contact with it, and a mechanism which thermally connects/disconnects the cooling storage body 6 and the exhaust panel. The mechanism which performs thermal connection/disconnection has a movable unit which has a good heat conductivity and can come into contact with and separate from the exhaust panel and the cooling storage body.
1 . A cryotrap set in a vacuum processing apparatus including an exhaust pump which evacuates an inside of the vacuum processing apparatus to a predetermined pressure, the cryopump including an exhaust panel which condenses and exhausts a gas by cooling the inside of the vacuum processing apparatus, and a cooling stage which is cooled by a refrigerator connected thereto, comprising:
a cooling storage body which thermally contacts the cooling stage and is held by the cooling stage; and
a connection and disconnection mechanism which thermally connects or disconnects the exhaust panel and said cooling storage body.
2 . The cryotrap according to claim 1 , wherein said connection and disconnection mechanism is configured to include a movable unit which has a good heat conductivity and can come into contact with and separate from both the exhaust panel and said cooling storage body.
3 .- 4 . (canceled)
5 . The cryotrap according to claim 1 , wherein said connection and disconnection mechanism is made of a deformable member which has a good heat conductivity, is fixed to one of the exhaust panel and said cooling storage body, and is arranged to be thermally contactable with and separable from the other one.
6 .- 7 . (canceled)
8 . The cryotrap according to claim 1 , wherein said connection and disconnection mechanism is configured to change a heat transfer characteristic between said cooling storage body and the exhaust panel by gaseous convection generated by introducing a gas into a space formed between the exhaust panel and said cooling storage body or exhausting a gas from the space.
9 . The cryotrap according to claim 1 , wherein a heater is set on the exhaust panel to rapidly heat the exhaust panel.
10 . The cryotrap according to claim 1 , wherein said cooling storage body has a heat capacity not less than 2.0 times a heat capacity of the exhaust panel.
11 . (canceled)
12 . The cryotrap according to claim 1 , wherein the exhaust panel is attached on an outer surface of a vacuum vessel set in the vacuum processing apparatus, and said cooling storage body and the cooling stage are accommodated in the vacuum vessel.
13 . (canceled)
14 . The cryotrap according to claim 1 , further comprising a valve which divides the inside of the vacuum processing apparatus into a first space in which a vacuum state is maintained, and a second space exposed to the atmosphere by detaching a member,
wherein said cooling storage body and the cooling stage accommodated in the second space via the member can be separated from the second space by detaching the member.
15 . (canceled)
16 . A vacuum processing apparatus comprising the cryotrap of claim 1 .
17 . The vacuum processing apparatus according to claim 16 , further comprising a valve which connects the exhaust pump to the vacuum processing apparatus,
wherein said cryotrap is inserted between said valve and the exhaust pump.