Analysis apparatus and analysis method of chlorosilanes

1. An analysis apparatus of chlorosilanes, which is in communication with an atmosphere external to the analysis apparatus, comprising:

a draft chamber having a top, a bottom, and walls which communicates with the atmosphere external to the analysis apparatus;

a vaporizer contained in the draft chamber for vaporizing chlorosilanes; and

an analyzer for analyzing evaporation residues;

wherein the vaporizer comprises:

a hotplate,

a cover detachably attached onto the hotplate composing a heating chamber, in contact with an atmosphere external to the analysis apparatus, together with the hotplate, and

one or more of sample vessels, in which their upside are open to store the chlorosilanes in them, arranged in the heating chamber; and

wherein the cover comprises:

a supply port for supplying an inert gas or nitrogen gas into the heating chamber and

a discharge port for discharging gases in the heating chamber.

2. The analysis apparatus of claim 1 , wherein the cover comprises a single supply port and a plurality of discharge ports.

3. The analysis apparatus of claim 1 , wherein the supply port can have a nozzle with a plurality of supply ports.

4. The analysis apparatus of claim 1 , wherein the discharge ports communicate with a box on and abutting the cover of the heating chamber.

5. The analysis apparatus of claim 1 , wherein the discharge ports communicate with a box connected to and abutting the cover of the heating chamber.

6. The analysis apparatus of claim 1 , wherein a height of a lower edge of the supply port is equal to a height of a lower edge of the discharge port.

7. The analysis apparatus of chlorosilanes according to claim 1 , wherein a heating face of the hotplate, an inner face of the cover, and the sample vessel are made of a fluoride type resin.

8. The analysis apparatus of chlorosilanes according to claim 7 , wherein the supply port and the discharge port are located at higher places than positions of upper ends of the sample vessels.

9. The analysis apparatus of chlorosilanes according to claim 1 , wherein the supply port and the discharge port are located at higher places than positions of upper ends of the sample vessels.

10. The analysis apparatus of claim 9 , wherein the supply port and the discharge port are arranged on side walls facing each other.

11. An analysis method of chlorosilanes, using an analysis apparatus in communication with an atmosphere external to the analysis apparatus, comprising:

a vaporization process for vaporizing chlorosilanes and

an analysis process for analyzing an evaporation residue

wherein the vaporization process comprises steps in which the chlorosilanes are stored in sample vessels,

the sample vessels are arranged in a heating chamber in contact with an atmosphere external to the analysis apparatus, and

the heating chamber is heated with an inert gas flowing through the heating chamber.

12. The analysis method of chlorosilanes according to claim 11 , wherein a plurality of reference vessels, in which the chlorosilanes are not stored, are arranged in the heating chamber together with the sample vessels during the vaporization process.

13. The analysis method of claim 11 , wherein the inert gas supplied in the heating chamber through a supply port flows toward a discharge port together with a vapor of vaporized chlorosilanes derived from the sample vessels.

14. The analysis method of claim 11 , wherein nitrogen gas is charged to the heating chamber.