Storage container for liquid chlorosilane and closing lid therefor
The storage container for a liquid chlorosilane of the present invention comprises, a tank which stores the liquid chlorosilane, a valve which is connected to the tank and to which an external pipe can be connected detachably, and a closing lid which seals the valve when the external pipe is detached from the valve. The valve comprises a housing and a valve body provided in the housing. The closing lid has a lid body having a sealing surface contacting the connecting surface of the connecting flange, a supply pipe which supplies an inert gas to a space between the closing lid and the valve body in the housing, a supply valve which opens or closes the supply pipe, a discharge pipe which discharges a gas in the space, and a discharge valve which opens or closes the discharge pipe.
1. A storage container for a liquid chlorosilane, comprising:
a tank which stores the liquid chlorosilane;
a valve which is connected to the tank and to which an external pipe can be connected detachably; and
a closing lid which seals the valve when the external pipe is detached from the valve,
wherein the valve comprises a housing and a valve body provided in the housing, the housing has a connecting flange having a connecting surface to be connected detachably to the external pipe, and
the closing lid has a lid body having a sealing surface contacting the connecting surface of the connecting flange, a supply pipe which supplies an inert gas to a space between the closing lid and the valve body in the housing, a supply valve which opens or closes the supply pipe, a discharge pipe which discharges a gas in the space, and a discharge valve which opens or closes the discharge pipe.
2. The storage container for a liquid chlorosilane according to claim 1 , further comprising a gasket sandwiched between the connecting surface of the housing and the sealing surface of the lid body, and at least one of the connecting surface and the sealing surface has at least one groove formed thereon.
3. A closing lid for a liquid chlorosilane storage container connected detachably to a connecting flange of a valve fixed to a tank which stores the liquid chlorosilane, comprising:
a lid body having a sealing surface contacting a connecting surface of the connecting flange;
a supply pipe which supplies an inert gas to a space between the closing lid and a valve body of the valve;
a supply valve which opens or closes the supply pipe;
a discharge pipe which discharges a gas in the space; and
a discharge valve which opens or closes the discharge pipe,
wherein the closing lid is fixed to the connecting flange to seal the space.