Solder interconnect by addition of copper
View Patent ↗A method of forming an electronic device provides an electronic device substrate having a solder bump pad located thereover. A nickel-containing layer is located over the solder bump pad. A copper-containing layer is formed on the nickel-containing layer prior to subjecting the electronic device to a reflow process.
1. An electronic device, comprising:
an electronic device substrate having a bump pad located thereover, said bump pad including top and side surfaces;
an elemental nickel layer located over said top and side surfaces of said bump pad such that said bump pad is located between portions of said elemental nickel layer that are located over said side surfaces;
a solder bump on said elemental nickel layer, wherein said solder bump is composed of an alloy of silver, tin and copper, said copper having a concentration in a range of about 0.5 wt % to about 4 wt %; and
an intermetallic compound layer between said elemental nickel layer and said solder bump, wherein intermetallic compound layer includes:
a first intermetallic compound sublayer adjacent to said solder bump, said first intermetallic compound sublayer composed of an alloy of nickel, copper and tin, and
a second intermetallic compound sublayer adjacent to said first intermetallic compound sublayer and said elemental nickel layer, said second intermetallic compound sublayer composed of an alloy of nickel and tin.
2. The device of claim 1 , wherein said electronic device substrate is an integrated circuit die.
3. The device of claim 1 , wherein said electronic device substrate is a device package substrate.
4. The device of claim 3 , wherein said electronic device includes an integrated circuit substrate connected to said device package substrate by said solder bump.
5. The device of claim 1 , wherein said intermetallic compound layer has a thickness in a range of about 0.5 μm to about 2 μm.
6. The device of claim 1 , wherein the electronic device substrate is a first substrate and said device further comprises a second electronic device substrate, wherein said first and second substrates are coupled together by said solder bump.
7. The device of claim 1 , wherein said intermetallic layer is located over a portion less than an entirety of said top surface.
8. The device of claim 1 , wherein said intermetallic compound layer has a total mass that is about 0.1% to about 10% of a total mass of said solder bump.
9. The device of claim 1 , wherein said copper of said solder bump is uniformly distributed throughout said solder bump.
10. The device of claim 1 , wherein said alloy of nickel, copper and tin of said first intermetallic compound sublayer includes atomic ratios of about five atoms of said tin to about six atoms of said nickel plus said copper, and, more of said copper atoms than of said nickel atoms.
11. The device of claim 1 , wherein said alloy of nickel, copper and tin of said first intermetallic compound sublayer includes a concentration of said copper in a range of about 55 wt % to about 65 wt %.
12. The device of claim 1 , wherein the alloy of silver, tin and copper of said solder bumper includes said tin and said silver in a weight ratio of about 96:3.
13. An electronic device, comprising:
an electronic device substrate having a bump pad located thereover, said bump pad including top and side surfaces;
a elemental nickel layer located over said top and side surfaces of said bump pad such that said bump pad is located between portions of said elemental nickel layer that are located over said side surfaces;
a solder bump located over said elemental nickel layer, wherein said solder bump is composed of an alloy of silver, tin and copper, and
an intermetallic compound layer located between and in contact with said elemental nickel layer and said solder bump, wherein said intermetallic compound layer includes:
a first intermetallic compound sublayer adjacent to said solder bump, said first intermetallic compound sublayer composed of an alloy of nickel, copper and tin, and
a second intermetallic compound sublayer adjacent to said first intermetallic compound sublayer and said nickel-containing layer, said second intermetallic compound sublayer composed of an alloy of nickel and tin.
14. An electronic device comprising:
an electronic device substrate having a bump pad located thereover, said bump pad including top and side surfaces;
a nickel-containing layer located over said top and side surfaces of said bump pad such that said bump pad is located between portions of said nickel-containing layer that are located over said side surfaces;
a solder bump located over said nickel-containing layer, wherein said solder bump is composed of an alloy of silver, tin and copper, said copper having a concentration in a range of about 0.5 wt % to about 4 wt %, and
an intermetallic compound layer located between and in contact with said nickel-containing layer and said solder bump, wherein said intermetallic compound layer includes:
a first intermetallic compound sublayer adjacent to said solder bump, said first intermetallic compound sublayer composed of an alloy of nickel, copper and tin, and
a second intermetallic compound sublayer adjacent to said first intermetallic compound sublayer and said nickel-containing layer, said second intermetallic compound sublayer composed of an alloy of nickel and tin.
15. The device of claim 14 , wherein said intermetallic layer is located on and forms an interface with said nickel-containing layer.
16. An electronic device, comprising:
an electronic device substrate having a bump pad located thereover, said bump pad including side surfaces and a planar top surface comprising Al or Cu;
a nickel-containing layer located on and forming an interface with said top and side surfaces of said bump pad;
a solder bump located over said nickel-containing layer, wherein said solder bump is composed of an alloy of silver, tin and copper; and
an intermetallic compound layer located between and in contact with said nickel-containing layer and said solder bump, wherein said intermetallic compound layer includes:
a first intermetallic compound sublayer adjacent to said solder bump, said first intermetallic compound sublayer composed of an alloy of nickel, copper and tin, and
a second intermetallic compound sublayer adjacent to said first intermetallic compound sublayer and said nickel-containing layer, said second intermetallic compound sublayer composed of an alloy of nickel and tin.
17. The device of claim 16 , wherein said intermetallic compound layer layer is located on and forms an interface with said nickel-containing layer.
18. The device of claim 16 , wherein said electronic device substrate is an integrated circuit die.
19. The device of claim 16 , wherein said electronic device substrate is a device package substrate.
20. The device of claim 19 , wherein said electronic device includes an integrated circuit substrate connected to said package substrate by said solder bump.
21. The device of claim 16 , wherein said intermetallic compound layer has a thickness in a range of about 0.5 μm to about 2 μm.
22. The device of claim 16 , wherein said electronic device substrate is a first substrate and said electronic device further comprises a second electronic device substrate, wherein said first and second electronic device substrates are coupled together by said solder bump.
23. The device of claim 16 , wherein said first intermetallic compound layer is located over a portion less than an entirety of said top surface.