Methods of fabricating oxide layers on silicon carbide layers utilizing atomic oxygen
View Patent ↗Methods of forming oxide layers on silicon carbide layers are disclosed, including placing a silicon carbide layer in a chamber such as an oxidation furnace tube that is substantially free of metallic impurities, heating an atmosphere of the chamber to a temperature of about 500° C. to about 1300° C., introducing atomic oxygen in the chamber, and flowing the atomic oxygen over a surface of the silicon carbide layer to thereby form an oxide layer on the silicon carbide layer. In some embodiments, introducing atomic includes oxygen providing a source oxide in the chamber and flowing a mixture of nitrogen and oxygen gas over the source oxide. The source oxide may comprise aluminum oxide or another oxide such as manganese oxide. Some methods include forming an oxide layer on a silicon carbide layer and annealing the oxide layer in an atmosphere including atomic oxygen.
1. A method of forming an oxide layer on a silicon carbide layer, comprising:
placing a silicon carbide layer in a chamber;
placing an alumina wafer in the chamber;
heating an atmosphere of the chamber to a temperature of about 500° C. to about 1300° C.;
nitriding the alumina wafer to liberate atomic oxygen; and
flowing the atomic oxygen over a surface of the silicon carbide layer to form an oxide layer on the silicon carbide layer.
2. The method of claim 1 , wherein heating an atmosphere of the chamber comprises heating an atmosphere of the chamber to a temperature of about 1000° C. to about 1100° C.
3. The method of claim 1 , further comprising flowing oxygen gas over the alumina wafer.
4. A method of forming an oxide layer on a silicon carbide layer, comprising:
placing a silicon carbide layer in a chamber;
placing an alumina wafer in the chamber;
heating an atmosphere of the chamber to a temperature of about 500° C. to about 1300° C.;
nitriding the alumina wafer to liberate first atomic oxygen;
reacting the first atomic oxygen with oxygen gas to produce ozone;
cracking the ozone to produce second atomic oxygen in the vicinity of the silicon carbide layer; and
flowing the second atomic oxygen over a surface of the silicon carbide layer to form an oxide layer on the silicon carbide layer.
5. The method of claim 1 , wherein a major surface of the alumina wafer is parallel to a major surface of the silicon carbide layer.