Dichalcogenide selenium ink and methods of making and using same
View Patent ↗A selenium ink comprising a chemical compound having a formula RZ—Se x —Z′R′ stably dispersed in a liquid carrier is provided, wherein the selenium ink is hydrazine free and hydrazinium free. Also provided are methods of preparing the selenium ink and of using the selenium ink to deposit selenium on a substrate for use in the manufacture of a variety of chalcogenide containing semiconductor materials, such as, thin film transistors (TFTs), light emitting diodes (LEDs); and photoresponsive devices (e.g., electrophotography (e.g., laser printers and copiers), rectifiers, photographic exposure meters and photovoltaic cells) and chalcogenide containing phase change memory materials.
1. A selenium ink, comprising:
a chemical compound having a formula RZ—Se x —Z′R′; wherein Z and Z′ are each independently selected from the group consisting of sulfur, selenium and tellurium; wherein x is 2 to 20; wherein R is selected from the group consisting of H, C 1-20 alkyl group, a C 6-20 aryl group, a C 1-20 alkylhydroxy group, an arylether group and an alkylether group; wherein R′ is selected from the group consisting of a C 1-20 alkyl group, a C 6-20 aryl group, a C 1-20 alkylhydroxy group, an arylether group and an alkylether group; and
a liquid carrier, wherein the liquid carrier is a nitrogen containing solvent;
wherein the selenium ink comprises ≧1 wt % selenium; wherein the selenium ink is stable and wherein the selenium ink is hydrazine and hydrazinium free.
2. The selenium ink of claim 1 , wherein Z and Z′ are both sulfur.
3. The selenium ink of claim 1 , wherein Z and Z′ are both Selenium; and wherein R and R′ are each independently selected from the group consisting of a phenyl group, a methyl group, an ethyl group, a propyl group, a butyl group, an isopropyl group and a tert-butyl group.
4. The selenium ink of claim 1 , wherein Z and Z′ are both sulfur; and wherein R and R′ are each independently selected from the group consisting of a phenyl group, a methyl group, an ethyl group, a propyl group, a butyl group, an isopropyl group and a tert-butyl group.
5. The selenium ink of claim 1 , wherein the liquid carrier is a liquid amine having a formula NR 3 , wherein each R is independently selected from the group consisting of a H, a C 1-10 alkyl group, a C 6-10 aryl group and a C 1-10 alkylamino group.
6. The selenium ink of claim 1 , wherein the liquid carrier is selected from the group consisting of ethylene diamine, diethylenetriamine, triethylenetetramine, n-butylamine, n-hexylamine, octylamine, 2-ethyl-1-hexylamine, 3-amino-1-propanol, pyridine, pyrrolidine, and tetramethylguanidine.
7. A method for depositing selenium on a substrate, comprising:
providing a substrate;
providing a selenium ink, comprising:
a chemical compound having a formula RZ—Se x —Z′R′; wherein Z and Z′ are each independently selected from the group consisting of sulfur, selenium and tellurium; wherein x is 2 to 20; wherein R is selected from the group consisting of H, C 1-20 alkyl group, a C 6-20 aryl group, a C 1-20 alkylhydroxy group, an arylether group and an alkylether group; wherein R′ is selected from the group consisting of a C 1-20 alkyl group, a C 6-20 aryl group, a C 1-20 alkylhydroxy group, and arylether group and an alkylether group; and
a liquid carrier, wherein the liquid carrier is a nitrogen containing solvent;
wherein the selenium ink comprises >1 wt % selenium; wherein the selenium ink is stable and wherein the selenium ink is hydrazine and hydrazinium free;
applying the selenium ink to the substrate forming a selenium precursor on the substrate; and
treating the selenium precursor to remove the liquid carrier depositing selenium on the substrate.