Integrated circuit inductors with reduced magnetic coupling
View Patent ↗An IC inductor structure is provided which includes a first inductor element formed on a semiconductor substrate and at least a second inductor element formed on the semiconductor substrate proximate the first inductor element. The first inductor element has a first effective magnetic field direction associated therewith, and the second inductor element has a second effective magnetic field direction associated therewith. The first and second inductor elements are oriented relative to one another so as to create a non-zero angle between the first and second effective magnetic field directions.
1. An integrated circuit inductor structure, comprising:
a first inductor element formed on a semiconductor substrate, the first inductor element having a first effective magnetic field direction associated therewith; and
at least a second inductor element formed on the semiconductor substrate proximate the first inductor element, the second inductor element having a second effective magnetic field direction associated therewith, the first and second inductor elements being oriented relative to one another so as to create a non-zero angle between the first and second effective magnetic field directions;
wherein at least one of the first and second inductor elements comprises a plurality of conductive loops in which a first conductive loop partially but not completely overlaps at least a second conductive loop.
2. The inductor structure of claim 1 , wherein the angle between the first and second effective magnetic field directions is substantially equal to ninety degrees.
3. The inductor structure of claim 1 , wherein each of the first and second inductor elements comprises one or more individual turns on a same inductor structure.
4. The inductor structure of claim 1 , wherein each of the first and second inductor elements comprises a spiral inductor having a directed magnetic field.
5. The inductor structure of claim 1 , wherein centers of respective ones of the plurality of conductive loops are arranged along an arc.
6. The inductor structure of claim 1 , wherein centers of respective ones of the plurality of conductive loops are arranged along a line slanted relative to the respective ones of the plurality of conductive loops.
7. The inductor structure of claim 1 , wherein any two adjacent conductive loops in the at least one inductor element are formed in different respective conductive layers in the integrated circuit.
8. The inductor structure of claim 1 , wherein the conductive loops in the at least one inductor element are substantially circular.
9. The inductor structure of claim 1 , wherein each of the first and second inductor elements is vertically oriented.
10. The inductor structure of claim 1 , wherein the first conductive loop and the second conductive loop are of different sizes.
11. The inductor structure of claim 10 , wherein the first conductive loop and the second conductive loop are concentric.
12. The inductor structure of claim 1 , wherein the first conductive loop and the second conductive loop are not concentric.
13. The inductor structure of claim 12 , wherein the first conductive loop and the second conductive loop are of substantially equal size.
14. An electronic system, comprising:
at least one integrated circuit including at least one inductor structure, the at least one inductor structure comprising:
a first inductor element formed on a semiconductor substrate, the first inductor element having a first effective magnetic field direction associated therewith; and
at least a second inductor element formed on the semiconductor substrate proximate the first inductor element, the second inductor element having a second effective magnetic field direction associated therewith, the first and second inductor elements being oriented relative to one another so as to create a non-zero angle between the first and second effective magnetic field directions;
wherein at least one of the first and second inductor elements comprises a plurality of conductive loops in which a first conductive loop partially but not completely overlaps at least a second conductive loop.
15. The system of claim 14 , wherein each of the first and second inductor elements comprises one or more individual turns on a same inductor structure.
16. The system of claim 14 , wherein each of the first and second inductor elements comprises a spiral inductor having a directed magnetic field.
17. The system of claim 14 , wherein centers of respective ones of the plurality of conductive loops are arranged along an arc.
18. The system of claim 14 , wherein centers of respective ones of the plurality of conductive loops are arranged along a line slanted relative to the respective ones of the plurality of conductive loops.
19. The system of claim 14 , wherein the conductive loops in the at least one inductor element are substantially circular.
20. A method of reducing magnetic coupling between at least two integrated circuit inductors, the method comprising the steps of:
forming a first inductor element on a semiconductor substrate, the first inductor element having a first effective magnetic field direction associated therewith; and
forming at least a second inductor element on the semiconductor substrate proximate the first inductor element, the second inductor element having a second effective magnetic field direction associated therewith, the first and second inductor elements being oriented relative to one another so as to create a non-zero angle between the first and second effective magnetic field directions;
wherein at least one of the first and second inductor elements comprises a plurality of conductive loops in which a first conductive loop partially but not completely overlaps at least a second conductive loop.