Semiconductor device including an LSI chip and a method for manufacturing the same
View Patent ↗A semiconductor device that can be readily manufactured, can include a large number of pads, and can be thin, and a method for manufacturing the same are provided. The semiconductor device is characterized in that the semiconductor device includes an LSI chip, an insulating layer provided on the LSI chip and made of a nonphotosensitive resin, the insulating layer including a via hole in the position corresponding to an externally connected pad, and a wiring layer extending along the insulating layer through the via hole to the externally connected pad, and at least part of the via hole is formed by irradiating the insulating layer with laser light.
1. A method for manufacturing a semiconductor device, comprising:
(A) preparing a individually divided LSI chip including an externally connected pad;
(B) forming an insulating layer made of a nonphotosensitive resin on the LSI chip;
(C) irradiating a position on the insulating layer corresponding to the externally connected pad with laser light, to form an opening in the insulating layer in such a way that part of the insulating layer is left in the position corresponding to the externally connected pad;
(D) carrying out dry etching or wet etching at bottom of the opening, to remove the insulating layer left in the position corresponding to the externally connected pad, and then to form a via hole passing through the insulating layer so that the externally connected pad is exposed
(E) forming a wiring layer extending along the insulating layer through the via hole to the externally connected pad.
2. The method for manufacturing a semiconductor device according to claim 1 ,
wherein the externally connected pad includes an Al layer primarily containing Al and a TiN layer provided as an overlying layer on the Al layer, and
in step (D), the dry etching is carried out to remove the insulating layer and the TiN layer and then to expose the Al layer of the externally connected pad.
3. The method for manufacturing a semiconductor device according to claim 1 ,
wherein the externally connected pad includes a layer primarily containing Al.
4. The method for manufacturing a semiconductor device according to claim 1 ,
wherein the externally connected pad includes a layer primarily containing Cu.
5. The method for manufacturing a semiconductor device according to claim 1 ,
wherein the externally connected pad includes the same surface as a reference surface of the LSI chip.
6. The method for manufacturing a semiconductor device according to claim 1 ,
wherein the entire externally connected pad is located on a LSI chip side under a reference surface of the LSI chip.
7. The method of manufacturing a semiconductor device according to claim 1 ,
wherein part of the externally connected pad is located on a LSI chip side under a reference surface of the LSI chip.