Semiconductor device and method of manufacturing the same
View Patent ↗When a thin semiconductor device is formed by grinding a wafer, it has been necessary to dice the wafer into dies and process the back surfaces of the dies separately. In the invention, a wafer 2 a is half-diced from the front surface thereof to form groove portions 4 therein, and in this state, the front surface of the wafer 2 a is attached to a supporting body 5 having rigidity with an adhesive layer 6. Then, the wafer 2 a is ground from the back surface and diced into individual dies 2 b, and then a back surface process including a heat treatment such as the formation of back surface electrodes 9 a is performed in the state where the dies 2 b are attached to the supporting body 5.
1. A method of manufacturing a semiconductor device, comprising:
providing a wafer comprising element regions formed on a main surface thereof;
forming a plurality of groove portions in the main surface of the wafer so as to surround the element regions;
attaching a supporting body having rigidity to the main surface of the wafer with an adhesive layer so that the adhesive layer enters the groove portions so as not fill the groove portions completely;
dividing the wafer into a plurality of dies by thinning the wafer from another main surface thereof so as to expose the groove portions, each die comprising a corresponding element region;
performing a back surface process comprising a heat treatment to the another main surface of the wafer that is divided into the plurality of dies and attached to the supporting body; and
separating the plurality of dies by dissolving the adhesive layer.
2. The method of claim 1 , wherein the back surface process comprises forming back surface electrodes on the another main surfaces of the wafer.
3. The method of claim 2 , further comprising mounting one of the dies on an island, wherein the back surface electrode is bonded to the island using a conductive material so that the conductive material forms a side fillet corresponding to a shape of the back surface electrode on a sidewall of the die.
4. The method of claim 1 , wherein the supporting body comprises a glass, a quartz, a ceramic, a plastic, a metal or a resin.
5. The method of claim 1 , wherein the dies are thinned to 80μm or less.
6. The method of claim 1 , wherein the adhesive layer comprises an epoxy resin, a resist, or an acrylic resin.
7. The method of claim 1 , wherein the wafer and the supporting body are attached to each other after the adhesive layer is applied to the supporting body.
8. The method of claim 1 , wherein the wafer and the supporting body are attached to each other after the adhesive layer is applied to the wafer, and the adhesive layer enters the groove portions without prevented by wettability.
9. The method of claim 1 , wherein dissolution holes are formed in the supporting body, and the adhesive layer is removed by a resolvent injected through the dissolution holes.
10. The method of claim 1 , wherein the plurality of dies is fixed by a suction device and then a resolvent is sucked through the groove portions to dissolve the adhesive layer.
11. The method of claim 1 , further comprising attaching the another main surface of the wafer that has gone through the back surface process to a fixing tape.
12. A method of manufacturing a semiconductor device, comprising:
providing a wafer comprising element regions formed on a main surface thereof;
forming a plurality of groove portions in the main surface of the wafer so as to surround the element regions;
attaching a supporting body having rigidity to the main surface of the wafer with an adhesive layer so that the adhesive layer enters the groove portions;
dividing the wafer into a plurality of dies by thinning the wafer from another main surface thereof so as to expose the groove portions, each die comprising a corresponding element region;
performing a back surface process comprising a heat treatment to the another main surface of the wafer that is divided into the plurality of dies and attached to the supporting body; and
attaching the plurality of dies to a fixing tape, wherein
the fixing tape comprises openings and the adhesive layer is dissolved by a resolvent injected through the openings of the fixing tape.
13. A semiconductor device comprising:
a semiconductor die;
an element region formed on a main surface of the semiconductor die;
a back surface electrode formed on another main surface of the die;
an island bonded to the back surface electrode using a conductive material; and
a lead connected through a wire to an electrode formed in the element region on the main surface of the die,
wherein the back surface electrode bends to cover a portion of a sidewall of the semiconductor die, and a side fillet made of the conductive material is formed corresponding to a shape of the back surface electrode on the sidewall of the die.
14. The semiconductor device of claim 13 , wherein a thickness of the die is 80μm or less.