Resin molded semiconductor device and manufacturing method thereof
View Patent ↗This invention is directed to provide a method of manufacturing a resin molded semiconductor device with high reliability by preventing a resin leakage portion from occurring due to burrs on a lead frame formed by punching. The method of manufacturing the resin molded semiconductor device according to the invention includes bonding a semiconductor die on an island in a lead frame, electrically connecting the semiconductor die with the lead frame, resin-molding the lead frame on which the semiconductor die is bonded, and applying prior to the resin-molding a compressive pressure that is higher than a clamping pressure applied in the resin-molding to a region of the lead frame being clamped by molds in the resin-molding of the lead frame.
1. A method of manufacturing a resin molded semiconductor device, comprising:
providing a lead frame comprising an island;
bonding a semiconductor die on the island of the lead frame;
electrically connecting the semiconductor die to the lead frame;
resin-molding the lead frame on which the semiconductor die is bonded while clamping the lead frame with a mold so as to apply a clamping pressure to a region of the lead frame; and
applying a compressive pressure to the region of the lead frame prior to the resin-molding, the compressive pressure being greater than the clamping pressure.
2. The method of claim 1 , wherein the applying the compressive pressure forms a dent in the lead frame.