Process and system for providing acetylene
View Patent ↗A system and a process for providing acetylene, preferably at a high purity level (e.g., comprising 100 parts per million (“ppm”), or 10 ppm, or 1 ppm, or 100 parts per billion (“ppb”), or 10 ppb, or 1 ppb or less of solvent), to a point of use, such as a semiconductor manufacturing process, is described herein. In one aspect, there is provided a process for providing a process for providing a high purity acetylene comprising 100 ppm or less solvent to a point of use comprising: providing an acetylene feed stream comprising acetylene and solvent at a temperature ranging from 20° C. to −50° C.; and introducing the acetylene feed stream to a purifier at a temperature ranging from −50° C. to 30° C. to remove at least a portion of the solvent contained therein and provide the high purity acetylene.
1. A process for providing a high purity acetylene comprising 100 ppm or less solvent to a point of use comprising:
cooling an acetylene storage vessel comprising acetylene and at least one solvent to a temperature ranging from 0° C. to −35° C.; and
dispensing acetylene directly from the storage vessel as a high purity fluid acetylene stream to a point of use, wherein the solvent is present at 100 ppm or less in the acetylene stream.
2. The process of claim 1 wherein the at least one solvent is selected from the group consisting of: acetone, dimethyl formamide, N-methylpyrrolidone, and combinations thereof.
3. The process of claim 2 wherein the solvent is dimethylformamide.
4. The process of claim 3 further comprising passing the acetylene and the at least one solvent through at least one purifier prior to the dispensing step.
5. The method of claim 4 wherein the at least one purifier comprises a purifier selected from the group consisting of: activated carbon, a molecular sieve, silica gel, zeolite, and combinations thereof.