Semiconductor device and fabricating method thereof
View Patent ↗Semiconductor devices and a fabricating method therefore are disclosed. One method includes forming a buffer oxide layer and a buffer nitride layer on the top surface of a semiconductor substrate; forming a photoresist pattern on the pad nitride layer and forming a trench by etching the buffer nitride layer, the buffer oxide layer and the semiconductor substrate by a predetermined etch using the photoresist pattern as a mask; forming sidewall floating gates on the lateral faces of the trench; depositing polysilicon on the entire surface of the resulting structure; forming a gate electrode by patterning the polysilicon of the resulting structure; removing the buffer nitride layer and forming a poly oxide layer on the exposed part of the polysilicon of the gate electrode; forming source/drain regions by implanting impurities into the predetermined part of the resulting structure; injecting electric charges into the sidewall floating gates; and forming spacers on the lateral faces of the sidewall floating gates and the gate electrode.
1. A method for fabricating a semiconductor device comprising:
(a) forming a buffer oxide layer and a buffer nitride layer on the top surface of a semiconductor substrate;
(b) forming a photoresist pattern on the pad nitride layer and forming a trench by etching the buffer nitride layer, the buffer oxide layer, and the semiconductor substrate by a predetermined etch using the photoresist pattern as a mask;
(c) forming sidewall floating gates on the lateral faces of the trench;
(d) depositing polysilicon on the semiconductor substrate including filling the trench;
(e) patterning the polysilicon to form a gate electrode;
(f) removing the buffer nitride layer after forming the gate electrode, and forming a poly oxide layer on the exposed part of the polysilicon of the gate electrode;
(g) forming source/drain regions by implanting impurities into the semiconductor substrate, wherein the source region is elevated to the same level as the drain region;
(h) injecting electric charges into the sidewall floating gates; and
(i) forming spacers on the lateral faces of the sidewall floating gates and the gate electrode.
2. A method as defined by claim 1 , further comprising forming a silicide layer on the source and drain regions and the top of the gate electrode.
3. A method as defined by claim 1 , further comprising depositing a first block oxide layer on the bottom of the trench and a first gate oxide layer on the lateral faces of the trench before forming the sidewall floating gates.
4. A method as defined by claim 3 , further comprising removing the exposed first gate oxide layer between the sidewall floating gates and forming a second gate oxide layer where the first gate oxide layer was removed and a second block oxide layer on the surface of the sidewall floating gates before depositing polysilicon on the entire surface.
5. A method as defined by claim 1 , wherein the trench is etched in a depth between 200 Å and 2000 Å.
6. A method as defined by claim 1 , wherein virtual source and drain extension regions are formed by an strong inversion layer under the trench of the sidewall floating gates by injecting electric changes into the sidewall floating gates.
7. A method as defined by claim 6 , wherein the virtual source and drain extension regions has a depth between 5 nanometers and 10 nanometers.
8. A method as defined by claim 1 , wherein the source region is provided at one side of the trench and the drain region is provided along the same horizontal plane at the opposite side of the trench.
9. A method as defined by claim 1 , wherein at least a portion of the gate electrode is in the trench.
10. A method as defined by claim 1 , wherein at least a portion of the sidewall floating gates are in the trench.
11. A method as defined by claim 1 , further comprising a silicide layer on the source and drain regions, wherein a thickness of the silicide layer is thinner than a depth of the source and drain junctions.