Plasma treatment of a semiconductor surface for enhanced nucleation of a metal-containing layer
View Patent ↗A method for forming a dielectric layer is provided. The method may include providing a semiconductor surface and etching a thin layer of the semiconductor substrate to expose a surface of the semiconductor surface, wherein the exposed surface is hydrophobic. The method may further include treating the exposed surface of the semiconductor substrate with plasma to neutralize a hydrophobicity associated with the exposed surface, wherein the exposed surface is treated using plasma with a power in a range of 100 watts to 500 watts and for duration in a range of 1 to 60 seconds. The method may further include forming a metal-containing layer on a top surface of the plasma treated surface using an atomic layer deposition process.
1. A method for forming a dielectric layer, comprising:
providing a semiconductor substrate;
etching a thin layer of the semiconductor substrate to expose a surface of the semiconductor substrate;
treating the exposed surface of the semiconductor substrate with plasma to form a plasma modified layer of an amorphous form between 10 to 100 Angstroms deep; and
forming a metal-containing dielectric layer on a top surface of the plasma treated surface using an atomic layer deposition process.
2. The method of claim 1 , wherein etching comprises using hydrofluoric acid to etch the thin layer.
3. The method of claim 1 , wherein the plasma is performed in situ.
4. The method of claim 1 , wherein the metal-containing dielectric layer comprises a metal oxide including at least one of hafnium dioxide, lanthanum oxide, yttrium oxide, titanium oxide, tantalum oxide, zirconium oxide, or an oxide having other rare earth metals or transition metals, or any combination thereof.
5. The method of claim 4 , wherein the metal-containing dielectric layer further comprises aluminates.
6. The method of claim 1 , wherein the metal-containing dielectric layer comprises at least one of metal silicate and metal-silicon-oxynitride.
7. The method of claim 6 , wherein the metal silicate is at least one of hafnium silicate, lanthanum silicate, and any other silicates having other rare earth metals or transition metals, or any combination thereof.
8. The method of claim 1 , wherein treating the exposed surface of the semiconductor substrate with plasma creates a plasma modified layer and improves the nucleation of the metal-containing dielectric layer on a top surface of the plasma modified layer.
9. The method of claim 1 , wherein the exposed surface is treated using plasma with a power in a range of 100 watts to 500 watts for a duration in a range of 1 to 60 seconds.
10. The method of claim 1 , wherein treating the exposed surface of the semiconductor substrate includes using a plasma including an inert gas.
11. The method of claim 10 , wherein treating the exposed surface of the semiconductor substrate with plasma including the inert gas includes using the inert gas beyond the plasma ignition stage.
12. The method of claim 1 , wherein treating the exposed surface of the semiconductor substrate with plasma to form a plasma modified layer comprises providing an additional gas including at least one of fluorine, chlorine, and nitrogen.
13. The method of claim 1 , wherein forming a metal-containing dielectric layer includes forming a thin gate dielectric layer on the top surface of the plasma treated surface.
14. The method of claim 1 , wherein forming a metal-containing dielectric layer comprises completing multiple cycles of the atomic layer deposition process.
15. The method of claim 1 , wherein the metal-containing dielectric layer comprises hafnium dioxide.
16. The method of claim 1 , wherein etching a thin layer comprises removing a native oxide formed on a top surface of the semiconductor substrate.
17. The method of claim 1 , wherein the plasma modified layer is between about 11 and about 100 Angstroms deep.