Image sensor having dielectric layer which allows first impurity region of photodiode to be isolated from contact plug and second impurity region of the photodiode to contact the contact plug
View Patent ↗An image sensor and a method of manufacturing the same. An image sensor may include a first interlayer dielectric layer having a first metal wiring and/or a bonding silicon including impurity regions on and/or over a first interlayer dielectric layer. An image sensor may include a second interlayer dielectric layer formed on and/or over a bonding silicon, and/or a first contact plug connected to a first metal wiring. An image sensor may include a third interlayer dielectric layer on and/or over a second interlayer dielectric layer, a second contact plug connected to a first impurity region and/or a second metal wiring on and/or over a second interlayer dielectric layer. An image sensor may include and a color filter layer and/or a microlens. A dielectric layer may be between a first contact plug and a first impurity region. A dielectric layer may be on and/or over a second interlayer dielectric layer.
1. An apparatus comprising:
a first interlayer dielectric layer including a first metal wiring;
a bonding silicon over said first interlayer dielectric layer including a first impurity region and a second impurity region;
a second interlayer dielectric layer over said bonding silicon;
a first contact plug connected to said first metal wiring by penetrating through at least a portion of said bonding silicon; and
a dielectric layer between said first contact plug and said first impurity region, wherein at least a portion of said dielectric layer is formed over said second interlayer dielectric layer.
2. The apparatus of claim 1 , comprising:
a third interlayer dielectric layer over said second interlayer dielectric layer;
a second contact plug connected to said first impurity region by penetrating through at least a portion of said third interlayer dielectric layer; and
a second metal wiring over said second interlayer dielectric layer and connected to said second contact plug.
3. The apparatus of claim 2 , comprising at least one of a color filter layer and a microlens over an upper side of said second metal wiring.
4. The apparatus of claim 1 , wherein said dielectric layer comprises a low temperature oxide layer.
5. The apparatus of claim 4 , wherein said low temperature oxide layer is configured to be deposited at approximately 180° C.
6. The apparatus of claim 1 , wherein said dielectric layer extends from an upper surface of said second interlayer dielectric layer to between said first contact plug and said first impurity region.
7. The apparatus of claim 1 , wherein said second interlayer dielectric layer includes an oxide layer formed over said bonding silicon and a nitride layer formed over said oxide layer.
8. The apparatus of claim 1 , wherein said second interlayer dielectric layer comprises a different etching selectivity relative to silicon.
9. The apparatus of claim 1 , wherein said first impurity region comprises p+ type impurity and said second impurity region comprises n+ type impurity.
10. The apparatus of claim 1 , wherein said second impurity region is formed over a lower side of said bonding silicon relative to the position of said first impurity region.