Granted Patent B2

US 8,536,582 · App. 12/622,861 · Granted Sep 17, 2013

Abstract

Claims (22)

1. A silicon carbide-based power device, comprising:

a silicon carbide drift layer having a planar surface that forms an off-axis angle with a <0001> direction that is greater than 2° and less than 4°;

a silicon carbide substrate having a planar surface that forms an off-axis angle with a <0001>direction of greater than 2° and less than 4° , wherein the silicon carbide drift layer comprises an epitaxial layer on the planar surface of the silicon carbide substrate; and

a silicon carbide buffer layer between the silicon carbide substrate and the silicon carbide drift layer, wherein the silicon carbide buffer layer has a thickness between about 10 μm and about 25 μm.

2. The silicon carbide based power device of claim 1 , wherein the silicon carbide buffer layer has a basal plane dislocation density at a surface opposite the substrate of less than about 10/cm 2 .

3. The silicon carbide based power device of claim 1 , wherein the silicon carbide buffer layer has a basal plane dislocation density at the surface opposite the substrate of less than about 2/cm 2 .

4. The silicon carbide based power device of claim 1 , wherein the silicon carbide buffer layer has a basal plane dislocation density at the surface opposite the substrate of less than about 1/cm 2 .

5. The silicon carbide based power device of claim 1 , wherein the silicon carbide buffer layer is on a carbon face of the substrate.

6.

a silicon carbide-based power device, comprising;

a silicon carbide drift layer having a planar surface the forms an off-axis angle with a <0001> direction that is less than 2°;

wherein the silicon carbide drift layer has a first conductivity type, the silicon carbide based power device comprising a gate turn off thyristor including a silicon carbide substrate having a second conductivity type opposite the first conductivity type and a silicon carbide buffer layer on the substrate, wherein the drift layer is on the buffer layer, a first epitaxial layer on the drift layer and having the second conductivity type, a second epitaxial layer on the first epitaxial layer and having the first conductivity type, a gate contact on the first epitaxial layer, a cathode contact on the second epitaxial layer and an anode contact on the substrate.

7. The silicon carbide based power device of claim 6 , wherein the device has a forward voltage drift of less than 100 mV after 40 hours of conducting forward current.

8. A method of forming a silicon carbide-based power device, comprising:

forming a silicon carbide substrate having a planar surface that forms an off-axis angle with a <0001>direction of greater than 2° and less than 4°;

forming a silicon carbide buffer layer on the silicon carbide substrate, wherein the silicon carbide buffer layer has a thickness between about 10 μm and about 25 μm; and

forming a silicon carbide drift layer on the buffer layer, the silicon carbide drift layer having a planar surface that forms an off-axis angle with a <0001>direction of greater than 2° and less than 4°.

9. A method of forming a silicon carbide-based power device, comprising:

forming a silicon carbide drift layer having a planar surface that forms an off-axis angle with a <0001> direction of less than 8°;

wherein the silicon carbide drift layer is formed by chemical vapor deposition including a chlorine containing compound that produces a dynamic co-etching rate of the silicon carbide drift layer of between 0.5 and 3 microns per hour.

10. The method of claim 9 , wherein chemical vapor deposition is performed at a temperature greater than 1600° C.

11. The method of claim 9 , wherein chemical vapor deposition performed at a temperature between 1600° C. and 1800° C.

Assignments (8)