Double gate FET and fabrication process
View Patent ↗A method of fabricating a double gate FET on a silicon substrate includes the steps of sequentially epitaxially growing a lower gate layer of crystalline rare earth silicide material on the substrate, a lower gate insulating layer of crystalline rare earth insulating material, an active layer of crystalline semiconductor material, an upper gate insulating layer of crystalline rare earth insulating material, and an upper gate layer of crystalline rare earth conductive material. The upper gate layer and the upper gate electrically insulating layer are etched and a contact is deposited on the upper gate layer to define an upper gate structure. An impurity is implanted into the lower gate layer to define a lower gate area aligned with the upper gate structure. A source and drain are formed in the active layer and contacts are deposited on the source and drain, respectively.
1. A method of fabricating a double gate field effect transistor structure comprising the following steps performed in any convenient order:
providing a single crystal silicon substrate;
epitaxially growing a lower gate layer of single crystal rare earth electrically conductive silicide material on the silicon substrate;
epitaxially growing a lower gate electrically insulating layer of single crystal rare earth electrically insulating material on the lower gate layer of single crystal rare earth electrically conductive silicide material;
epitaxially growing an active layer of single crystal semiconductor material on the lower gate layer of single crystal rare earth electrically insulating material;
epitaxially growing an upper gate insulating layer of single crystal rare earth electrically insulating material on the active layer of single crystal semiconductor material;
epitaxially growing an upper gate layer of single crystal rare earth electrically conductive material on the upper gate electrically insulating layer;
etching the upper gate layer and the upper gate electrically insulating layer and depositing a metal contact on the upper gate layer to define an upper gate structure;
implanting an impurity into the lower gate layer of single crystal rare earth electrically conductive silicide material to define a lower gate area aligned with the upper gate structure;
forming a source area and drain area in the active layer; and
depositing metal source and drain contacts on the source area and drain area, respectively.
2. A method as claimed in claim 1 wherein the step of epitaxially growing the electrically conductive layer of single crystal rare earth silicide material includes using one of erbium and ytterbium as the rare earth.
3. A method as claimed in claim 1 wherein the step of epitaxially growing the active layer of single crystal semiconductor material includes growing an active layer of single crystal silicon material.
4. A method as claimed in claim 1 wherein the step of epitaxially growing the lower gate electrically insulating layer includes growing a layer with a thickness of 10 nm or less.
5. A method as claimed in claim 1 wherein the step of epitaxially growing the upper gate electrically insulating layer includes growing a layer with a thickness of 10 nm or less.
6. A method as claimed in claim 1 wherein the step of implanting the impurity includes implanting oxygen.
7. A method as claimed in claim 1 further including a step of forming an electrically conductive via coupled to the lower gate area.
8. A method as claimed in claim 1 wherein each of the lower gate layer, the lower gate electrically insulating layer, the active layer, the upper gate electrically insulating layer, and the upper gate layer are substantially lattice matched to the single crystal silicon substrate, the lower gate layer, the lower gate electrically insulating layer, the active layer, and the upper gate electrically insulating layer, respectively.
9. A method as claimed in claim 1 wherein the steps of epitaxially growing a lower gate layer, epitaxially growing a lower gate electrically insulating layer, epitaxially growing an active layer, epitaxially growing an upper gate insulating layer, and epitaxially growing an upper gate layer are all performed in-situ.