Curable resin compositions useful as underfill sealants for use with low-k dielectric-containing semiconductor devices
View Patent ↗This invention relates to thermosetting resin compositions useful for flip chip (“FC”) underfill sealant materials, where a semiconductor chip is mounted directly onto a circuit through solder electrical interconnections. Similarly, the compositions are useful for mounting onto a circuit board semiconductor devices, such as chip size or chip scale packages (“CSPs”), ball grid arrays (“BGAs”), land grid arrays (“LGAs”) and the like, each of which having a semiconductor chip, such as large scale integration (“LSI”), on a carrier substrate.
1. A thermosetting resin composition, comprising:
as a curable component a silane modified epoxy component, wherein the silane modified epoxy component comprises 10 up to 95 wt % of the total composition,
a hardener, wherein the hardener is a cyanate ester or an aromatic amine,
silica filler and optionally, a catalyst,
wherein the silane modified epoxy component is a pre-mix comprising:
As component (A) an epoxy embraced by the following structure:
wherein:
Y may or may not be present and when present, Y is a direct bond, CH 2 , CH(CH 3 ) 2 , C═O, or S,
R 1 here is alkyl, alkenyl, hydroxy, carboxy or halogen, and x here is 1-4;
As component (B) an epoxy-functionalized alkoxy silane embraced by the following structure:
R 1 —Si(OR 2 ) 3
wherein:
R 1 here is an oxirane-containing moiety and
R 2 is an alkyl or alkoxy-substituted alkyl, aryl, or aralkyl group having from one to ten carbon atoms; and
As component (C) reaction products of components (A) and (B), and
wherein when cured as an underfill sealant the composition exhibits a modulus at room temperature in the range of 6,000 to 10,000 MPas and a CTE α1 in the range of 7 to 20 ppm.
2. A method of improving reliability of a semiconductor device comprising at least one layer of low-K ILD, steps of which comprise:
providing a semiconductor device comprising:
a semiconductor chip comprising copper electrical interconnections and at least one layer of low-K ILD therewithin and metallization on a surface thereof; and
a carrier substrate having electrical contact pads on a surface thereof to which the semiconductor chip is electrically interconnected through an electrically conductive material to the copper electrical interconnections;
providing a thermosetting resin composition according to claim 1 between the electrically interconnected surfaces of the semiconductor chip and the carrier substrate to form a semiconductor device assembly; and
exposing the semiconductor device assembly to elevated temperature conditions sufficient to cure the thermosetting resin composition.
3. The method of claim 2 , wherein after the semiconductor chip and the carrier substrate are mated the thermosetting resin composition is provided by dispensing and filling the space therebetween to form the semiconductor device.
4. The method of claim 2 wherein the thermosetting resin composition is provided by dispensing onto at least a portion of an electrically interconnecting surface of one or both of the semiconductor chip or the carrier substrate, and the semiconductor chip and the carrier substrate are then mated to form the semiconductor device.
5. The method of claim 2 , wherein the carrier substrate is a circuit board.
6. The method of claim 2 , wherein the electrically conductive material is solder.
7. The method of claim 2 , wherein the solder is selected from the group consisting of Sn(63):Pb(37), Pb(95):Sn(5), Sn:Ag(3.5):Cu(0.5) and Sn:Ag(3.3):Cu(0.7), or copper pillars-solder interconnect.
8. A semiconductor device comprising:
a semiconductor chip comprising copper electrical interconnections and the layer of low-K ILD therewithin and metallization on a surface thereof;
a circuit board having electrical contact pads on a surface thereof to which the semiconductor chip is electrically interconnected; and
a thermosetting resin composition according to claim 1 between the semiconductor chip and the circuit board.
9. A semiconductor device assembly comprising:
a semiconductor device comprising a semiconductor chip comprising copper electrical interconnections thereof contacting at least one layer of low-K ILD therewithin, therewithin and metallization on a surface thereof to which is electrically connected a carrier substrate;
a circuit board having electrical contact pads on a surface thereof to which the semiconductor device is electrically interconnected; and
a thermosetting resin composition according to claim 1 between the semiconductor device and the circuit board.
10. The composition of claim 1 , wherein component (C) is made from components (A) and (B) in a weight ratio of 1:100 to 100:1.
11. The composition of claim 1 , wherein component (C) is made from components (A) and (B) in a weight ratio of 1:10 to 10:1.
12. The composition of claim 1 wherein when cured as an underfill sealant the composition exhibits a modulus at room temperature in the range of 7,000 to 9,000 MPas.
13. The composition of claim 1 wherein when cured as an underfill sealant the composition exhibits a CTE α1 in the range of 10 to 20 ppm.
14. The composition of claim 1 wherein the hardener is a cyanate ester.
15. The composition of claim 1 wherein the hardener is an aromatic amine.
16. The composition of claim 1 wherein the hardener comprises 10 up to 50 wt % of the total composition.
17. The composition of claim 1 wherein the filler comprises 10 up to 80 wt % of the total composition.