Semiconductor device and method of manufacturing the same
View Patent ↗An object is to prevent a failure, such as a wiring separation or a crack, in an insulating film under a copper wire, in a semiconductor device formed by wire-bonding the copper wire on a portion above the copper wiring. A semiconductor device according to the present invention includes a copper wiring formed above a semiconductor substrate, a plated layer formed so as to cover a top surface and side surfaces of the copper wiring, and a copper wire which is wire-bonded on the plated layer above the copper wiring.
1. A semiconductor device comprising:
a semiconductor substrate;
an upper-layer wiring disposed on the semiconductor substrate;
an inorganic insulating film disposed on the upper-layer wiring and having an via hole;
a copper wiring disposed on the insulating film so as to be connected to the upper-wiring through the via hole in the insulating film, part of the copper wiring being disposed in the via hole in the insulating film;
a plated layer formed so as to cover a top surface and side surfaces of the copper wiring; and
a copper wire wire-bonded onto the plated layer above the copper wiring so that an end of the copper wire is attached to the plated layer,
wherein no wiring layer exists in any insulating film between the semiconductor substrate and the attached end of the copper wire.
2. The semiconductor device according to claim 1 , wherein the plated layer is formed of a laminated film made of Ni, Pd and Au.
3. The semiconductor device according to any one of claims 1 and 2 , wherein a barrier metal film formed of a laminated film having Ti and Cu-seed layers is formed under the copper wiring.
4. A method of manufacturing a semiconductor device, comprising:
providing a semiconductor substrate comprising an upper-layer wiring and an inorganic insulating film disposed on the upper-layer wiring and having a via hole;
forming a resist layer on the semiconductor substrate;
by using the resist layer as a mask, forming a copper wiring by plating on a region of the semiconductor substrate where the resist layer is not formed, so that the copper wiring fills the via hole in the inorganic insulating film;
removing the resist layer before forming any other layer on the copper wiring;
after removing the resist film, forming a plated layer so as to cover a top surface and side surfaces of the copper wiring; and
wire-bonding an end of a copper wire on the plated layer above the copper wiring so that no wiring layer exists in any insulating film between the semiconductor substrate and the bonded end of the copper wire.
5. A method of manufacturing a semiconductor device, comprising:
providing a semiconductor substrate comprising an upper-layer wiring and an inorganic insulating film disposed on the upper-layer wiring and having a via hole;
forming a barrier metal layer on the semiconductor substrate;
forming a resist layer on the barrier metal layer;
by using the resist layer as a mask, forming a copper wiring by plating on a region of the barrier metal layer where the resist layer is not formed, so that the copper wiring fills the via hole in the inorganic insulating film;
removing the resist layer before forming any other layer on the copper wiring;
after removing the resist film, removing the barrier metal film by using the copper wiring as a mask;
forming a plated layer so as to cover a top surface and side surfaces of the copper wiring; and
wire-bonding an end of a copper wire on the plated layer above the copper wiring so that no wiring layer exists in any insulating film between the semiconductor substrate and the bonded end of the copper wire.
6. The method of claim 4 or 5 , wherein the forming of the plated layer comprises laminating Ni, Pd and Au layers sequentially.
7. The method of claim 5 , wherein the barrier metal film comprises a laminated film having Ti and Cu-seed layers.