Spin MOS field effect transistor and tunneling magnetoresistive effect element using stack having Heusler alloy
View Patent ↗A spin MOS field effect transistor includes a source electrode and a drain electrode each having a structure obtained by stacking an impurity diffusion layer, a (001)-oriented MgO layer and a Heusler alloy. The impurity diffusion layer is formed in a surface region of a semiconductor layer. The (001)-oriented MgO layer is formed on the impurity diffusion layer. The Heusler alloy is formed on the MgO layer.
1. A spin MOS field effect transistor comprising a source electrode and a drain electrode each having a structure obtained by stacking:
a nonmagnetic metal amorphous layer formed on a semiconductor layer;
a (001)-oriented MgO layer formed on the nonmagnetic metal amorphous layer; and
a Heusler alloy formed on the MgO layer.
2. The transistor according to claim 1 ,
wherein the semiconductor layer is made of a material selected from the group consisting of Si, Ge, and Si—Ge.
3. The transistor according to claim 1 , wherein the nonmagnetic metal amorphous layer contains at least one of a rare earth element selected from the group consisting of erbium (Er), ytterbium (Yb), yttrium (Y), gadolinium (Gd), and dysprosium (Dy), and a nonmagnetic element selected from the group consisting of silver (Ag), copper (Cu), gold (Au), aluminum (Al), ruthenium (Ru), tantalum (Ta), carbon (C), zirconium (Zr), indium (In), iridium (Ir), tungsten (W), molybdenum (Mo), platinum (Pt), nickel (Ni), and magnesium (Mg).