Granted Patent B2

US 8,541,735 · App. 12/662,237 · Granted Sep 24, 2013

Abstract

Claims (29)

1. A microdevice comprising:

a substrate having a top surface;

at least one void formed in the top surface;

a first optical element comprising a first optically transmissive material having an index of refraction and contained in the at least one void, wherein a top surface of the optically transmissive material does not extend beyond the top surface of the substrate and wherein the first optically transmissive material comprises at least one of SiOz, glass, InTiO 2 , photoresist, and sapphire, and wherein the first optical element is configured to transmit a beam of light propagating in a plane substantially parallel to the top surface of the substrate and has a symmetry axis which is substantially parallel to the top surface; and

a second optically transmissive material having a different index of refraction and disposed adjacent to the first optically transmissive material, and configured to either reflect or refract the beam of light at a boundary between the first and the second optically transmissive materials, and wherein the second optically transmissive material comprises at least one of air, water and an oil.

2. The microdevice of claim 1 , wherein the first optically transmissive material is configured to focus the beam of light to a focal point adjacent to the first optically transmissive material.

3. The microdevice of claim 2 , wherein the first and second optically transmissive materials are configured to shape the beam of light and deliver it to a target portion of the microdevice, which receives the beam shaped by the first and second optically transmissive materials.

4. The microdevice of claim 2 , further comprising a second optical element comprising the first optically transmissive material contained in a second void formed in the substrate surface, wherein the first optically transmissive material is substantially flush with the top surface of the substrate, wherein the second optical element further shapes the beam of light transmitted through the first optical element.

5. The microdevice of claim 4 , wherein the second optical material is substantially the same as the first optical material, and the first and second optical elements are lenses having different focal lengths.

6. The microdevice of claim 3 , wherein the target portion of the microdevice is at least one of a microfabricated cell sorter, a cell counter, and optical emitter and an optical detector, and wherein a cover is affixed to the top surface of the substrate, to form at least one fluid channel in the substrate.

7. The microdevice of claim 1 , wherein the shape of the first optical element is at least one of circular, parabolic, hyperbolic, dispersive, reflective and refractive.

8. The microdevice of claim 1 , wherein the first optical element is configured to perform at least one of diffract, disperse, diffuse, reflect, refract or focus the beam of light.

9. The microdevice of claim 5 , wherein the first optically transmissive material is silicon dioxide, the second optically transmissive material is open air, and the first optical element focuses the beam of light to a focal point within the second optically transmissive material, and wherein the first and second optical elements have a symmetry axis which is collinear with a line bisecting the first and second optical elements.

10. The microdevice of claim 9 , wherein the first and second optical elements shape the beam of light into parallel rays directed to a detection region of a microfluidic channel.

11. A method for making a microdevice, comprising:

forming a first void in a top surface of a substrate; and

depositing a thin layer of conductive material conformally over the top surface of the substrate and into the first void;

forming a first optical element by depositing a first optically transmissive material having an index of refraction into the first void;

planarizing the top surface of the first optically transmissive material until it is substantially flush with the top surface of the substrate, wherein the first optical element is configured to interact with a beam of light propagating in a plane substantially parallel to the top surface of the substrate; and

forming a second void into the top surface of the substrate, adjacent to and contiguous with the first optical element.

12. The method of claim 11 , further comprising:

etching a third void in the top surface of the substrate, configured to transport a volume of fluid from an input reservoir to an output reservoir.

13. The method of claim 12 , further comprising:

etching a movable actuator into the top surface of the substrate, configured to separate one component of the fluid from other components of the fluid.

14. The method of claim 12 , further comprising:

bonding an optically transmissive second substrate to the top surface of the substrate and over the third void, to form microfluidic channels confining the fluid, but allowing light to pass through to and from the microfluidic channels.

15. The method of claim 14 , wherein the substrate comprises a silicon-on-insulator substrate, the optically transmissive second substrate comprises a glass substrate, and the first optically transmissive material comprises silicon dioxide.

16. The method of claim 11 , wherein the first optical element is configured to perform at least one of diffract, disperse, diffuse, reflect, refract or focus the beam of light.

17. The method of claim 11 , wherein the first optical element has a shape selected from circular, parabolic, and hyperbolic, and a functionality selected from at least one of dispersive, reflective, refractive, diffractive, prismatic, birefringent, and polarization rotating.

Assignments (9)