IP Library › Patent Application 12669498
Patent Application Utility PCT National Stage
App. No. 12/669,498 · Confirmation No. 4737

APPARATUS, METHOD FOR DEPOSITING THIN FILM ON WAFER AND METHOD FOR GAP-FILLING TRENCH USING THE SAME

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2014-07-07 ABN Abandonment 2 View
2013-12-19 CTFR Final Rejection 12 View
2013-12-19 FWCLM Index of Claims 1 View
2013-12-19 SRFW Search information including classification, databases and other search related notes 1 View
2013-12-02 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2013-12-02 CLM Claims 8 View
2013-12-02 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2013-12-02 WFEE Fee Worksheet (SB06) 2 View
2013-12-02 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-12-02 WFEE Fee Worksheet (SB06) 1 View
2013-08-01 CTNF Non-Final Rejection 14 View
2013-08-01 892 List of references cited by examiner 1 View
2013-08-01 SRNT Examiner's search strategy and results 5 View
2013-08-01 SRFW Search information including classification, databases and other search related notes 1 View
2013-08-01 FWCLM Index of Claims 1 View
2012-12-20 RCEX Request for Continued Examination (RCE) 1 View
2012-12-20 WFEE Fee Worksheet (SB06) 2 View
2012-12-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-11-30 CTAV Advisory Action (PTOL-303) 3 View
2012-11-30 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 15 View
2012-11-24 WFEE Fee Worksheet (SB06) 1 View
2012-11-21 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2012-11-21 CLM Claims 8 View
2012-11-21 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2012-11-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-08-21 CTFR Final Rejection 24 View
2012-08-21 FWCLM Index of Claims 1 View
2012-07-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2012-07-26 CLM Claims 8 View
2012-07-26 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2012-07-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-07-26 WFEE Fee Worksheet (SB06) 1 View
2012-04-26 CTNF Non-Final Rejection 25 View
2012-04-26 892 List of references cited by examiner 1 View
2012-04-26 1449 List of References cited by applicant and considered by examiner 1 View
2012-04-26 1449 List of References cited by applicant and considered by examiner 1 View
2012-04-26 BIB Bibliographic Data Sheet 1 View
2012-04-26 1449 List of References cited by applicant and considered by examiner 1 View
2012-04-26 1449 List of References cited by applicant and considered by examiner 1 View
2012-04-26 FWCLM Index of Claims 1 View
2012-04-26 FOR Foreign Reference 15 View
2012-04-26 SRNT Examiner's search strategy and results 4 View
2012-04-26 SRFW Search information including classification, databases and other search related notes 1 View
2012-03-12 INTV.SUM.EX Examiner initiated interview summary (PTOL-413B) 2 View
2012-02-24 ELC. Response to Election / Restriction Filed 1 View
2012-02-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-02-24 WFEE Fee Worksheet (SB06) 1 View
2012-01-26 CTRS Requirement for Restriction/Election 8 View
2012-01-26 892 List of references cited by examiner 1 View
2011-11-29 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2011-11-29 FOR Foreign Reference 6 View
2011-11-29 FOR Foreign Reference 5 View
2011-11-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-11-29 TRAN.LET Transmittal Letter 1 View
2011-07-08 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2011-07-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-07-08 TRAN.LET Transmittal Letter 1 View
2011-04-11 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2011-04-11 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-04-11 TRAN.LET Transmittal Letter 1 View
2010-07-29 NTC.PUB Notice of Publication 1 View
2010-04-21 M903 Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed 1 View
2010-04-21 APP.FILE.REC Filing Receipt 3 View
2010-01-19 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2010-01-19 FOR Foreign Reference 19 View
2010-01-19 371P Documents submitted with 371 (National Stage) Applications 2 View
2010-01-19 FOR Foreign Reference 4 View
2010-01-19 FOR Foreign Reference 12 View
2010-01-19 N417 Electronic Filing System Acknowledgment Receipt 3 View
2010-01-19 TRAN.LET Transmittal Letter 1 View
2010-01-18 TRNA Transmittal of New Application 4 View
2010-01-18 371P Documents submitted with 371 (National Stage) Applications 31 View
2010-01-18 371P Documents submitted with 371 (National Stage) Applications 4 View
2010-01-18 OATH Oath or Declaration filed 5 View
2010-01-18 ADS Application Data Sheet 5 View
2010-01-18 WFEE Fee Worksheet (SB06) 2 View
2010-01-18 N417 Electronic Filing System Acknowledgment Receipt 3 View
2010-01-18 136A Authorization for Extension of Time all replies 4 View
2010-01-18 ABST Abstract 1 View
2010-01-18 SPEC Specification 18 View
2010-01-18 CLM Claims 4 View
2010-01-18 DRW Drawings-only black and white line drawings 8 View
2010-01-18 ABST Abstract 2 View
2010-01-18 FRPR Certified Copy of Foreign Priority Application 58 View
2010-01-18 WFEE Fee Worksheet (SB06) 1 View
2010-01-18 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
App. No.
12/669,498
Filed
2010-01-18
Pub. No.
US20100190341A1
Art Unit
1716