Method to control an atmosphere between a body and a substrate
View Patent ↗Systems to control an atmosphere about a substrate are described. The systems include a wall coupled to the substrate to create a resistance of the flow between different regions of the substrate.
1. A system to control an atmosphere about a substrate, the system comprising:
a template having a mold spaced-apart a distance from a surface of the substrate;
a supply of fluid coupled to introduce a flow between the mold and the substrate;
a substrate chuck supporting the substrate; and
a wall coupled to the substrate chuck to create a resistance of the flow between first and second regions of the substrate, with a position of the wall being varied in response to a decrease in a magnitude of the distance.
2. The system as recited in claim 1 further including a plurality of walls coupled to the substrate chuck.
3. The system as recited in claim 1 wherein the supply of fluid further includes a conduit to introduce the fluid between the mold and the substrate.
4. The system as recited in claim 1 wherein the supply of fluid further includes a plurality of conduits at differing locations to introduce the fluid between the mold and the substrate.
5. The system as recited in claim 1 wherein the fluid is selected from a group of gases including helium, hydrogen, nitrogen, carbon dioxide, and xenon.
6. The system as recited in claim 3 further including a pump system in fluid communication with the conduit.
7. The system as recited in claim 1 further including a motor in communication with the wall, with the motor being a solenoid selected from a group of solenoids comprising electric, pneumatic, and hydraulic.
8. A system to control an atmosphere about a substrate, the system comprising:
a template having a mold spaced-apart a distance from a surface of the substrate;
a supply of fluid coupled to introduce a flow between the mold and the substrate;
a substrate chuck supporting the substrate; and
a wall coupled to the substrate chuck to create a resistance of the flow between first and second regions of the substrate, with a position of the wall being varied to minimize a probability of contact between the wall and the template when a magnitude of the distance is decreased.
9. The system as recited in claim 8 further including a plurality of walls coupled to the substrate chuck.
10. The system as recited in claim 8 wherein the supply of fluid further includes a conduit to introduce the fluid between the mold and the substrate.
11. The system as recited in claim 8 wherein the supply of fluid further includes a plurality of conduits at differing locations to introduce the fluid between the mold and the substrate.
12. The system as recited in claim 11 further including a pump system in fluid communication with the conduit.
13. The system as recited in claim 8 wherein the fluid is selected from a group of gases including helium, hydrogen, nitrogen, carbon dioxide, and xenon.
14. The system as recited in claim 8 further including a motor in communication with the wall, with the motor being a solenoid selected from a group of solenoids comprising electric, pneumatic, and hydraulic.
15. A system to control an atmosphere about a substrate, the system comprising:
a template having a mold spaced-apart from a surface of the substrate a first distance;
a conduit in fluid communication with a pump system coupled to introduce a flow between the mold and the substrate;
a substrate chuck supporting the substrate; and
a wall coupled to the substrate chuck to create a resistance to the flow between first and second regions of the substrate to control the atmosphere about the first region, the wall positioned at a second distance, wherein the first distance is substantially greater than the second distance.
16. The system of claim 15 , wherein the second distance is between approximately 10 μm-100 μm.
17. The system as recited in claim 15 , further including a plurality of walls coupled to the substrate chuck.
18. The system as recited in claim 15 , further including a plurality of conduits at differing locations.
19. The system as recited in claim 15 , wherein the fluid is selected from a group of gases including helium, hydrogen, nitrogen, carbon dioxide, and xenon.
20. The system as recited in claim 15 , further including a motor in communication with the wall, with the motor being a solenoid selected from a group of solenoids comprising electric, pneumatic, and hydraulic.