IP Library Granted Patent US 8,208,294
Granted Patent B2
US 8,208,294 · App. 12/692,044 · Granted Jun 26, 2012

Resistive memory cell accessed using two bit lines

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Quick Facts
Patent No.
US 8,208,294
App. No.
12/692,044
Granted
Jun 26, 2012
Kind
B2
Abstract

An integrated circuit includes a first bit line and a resistance changing memory element coupled to the first bit line. The integrated circuit includes a second bit line and a heater coupled to the second bit line. The integrated circuit includes an access device coupled to the resistance changing memory element and the heater.

Claims (68)

1. An integrated circuit comprising:

a first bit line;

a resistance changing memory element coupled to the first bit line;

a second bit line;

a heater coupled to the second bit line; and

an access device coupled to the resistance changing memory element and the heater.

2. The integrated circuit of claim 1 , wherein the heater is configured for programming the resistance changing memory element.

3. The integrated circuit of claim 1 , wherein the heater laterally surrounds at least a portion of the resistance changing memory element.

4. The integrated circuit of claim 1 , wherein the resistance changing memory element laterally surrounds the heater.

5. The integrated circuit of claim 1 , further comprising:

a dielectric material between the resistance changing memory element and the heater.

6. The integrated circuit of claim 1 , wherein the resistance changing memory element is one of cylindrical-shaped and pipe-shaped.

7. The integrated circuit of claim 1 , wherein the heater is one of cylindrical-shaped and pipe-shaped.

8. The integrated circuit of claim 1 , wherein the resistance changing memory element comprises a phase change element.

9. A system comprising:

a host; and

a memory device communicatively coupled to the host; the memory device comprising:

a first bit line;

a phase change element coupled to the first bit line;

a second bit line;

a heater coupled to the second bit line; and

an access device coupled to the phase change element and the heater,

wherein the heater is configured for programming the phase change element.

10. The system of claim 9 , wherein the access device comprises a transistor.

11. The system of claim 9 , wherein the access device comprises a diode.

12. The system of claim 9 , further comprising:

a word line coupled to the access device.

13. The system of claim 9 , wherein the first bit line is parallel to the second bit line.

14. The system of claim 9 , further comprising:

a write circuit coupled to the second bit line, the write circuit configured to program the phase change element;

a sense circuit coupled to the first bit line, the sense circuit configured to read the phase change element; and

a controller configured to control the write circuit and the sense circuit.

15. A method for fabricating an integrated circuit, the method comprising:

providing a preprocessed wafer including an electrode;

fabricating a resistance changing element coupled to the electrode;

fabricating a heater coupled to the electrode;

fabricating a first bit line coupled to the heater; and

fabricating a second bit line coupled to the resistance changing element.

16. The method of claim 15 , wherein fabricating the resistance changing element comprises fabricating one of a cylindrical-shaped resistance changing element and a pipe-shaped resistance changing element.

17. The method of claim 15 , wherein fabricating the heater comprises fabricating one of a cylindrical-shaped heater and a pipe-shaped heater.

18. The method of claim 15 , further comprising:

fabricating a dielectric material spacer between the resistance changing element and the heater.

19. The method of claim 15 , wherein fabricating the resistance changing element comprises fabricating a phase change element.

20. A method for fabricating an integrated circuit, the method comprising:

providing a preprocessed wafer including an electrode;

depositing first dielectric material over the preprocessed wafer;

etching the first dielectric material to provide an opening exposing at least a portion of the electrode;

forming heater material on sidewalls of the opening;

forming second dielectric material on sidewalls of the heater material;

depositing phase change material over the first electrode and contacting the sidewalls of the second dielectric material;

etching portions of the first dielectric material and the heater material to expose portions of the sidewalls of the second dielectric material;

forming a first bit line contacting the heater material and sidewalls of the second dielectric material; and

forming a second bit line contacting the phase change material.

21. The method of claim 20 , further comprising:

recess etching a portion of the phase change material to provide a second opening; and

depositing a capping material in the second openings over the phase change material.

22. The method of claim 20 , wherein depositing the first dielectric material comprises depositing a first layer and a second layer different from the first layer.

23. The method of claim 20 , further comprising:

encapsulating the first bit line prior to forming the second bit line.

24. The method of claim 20 , wherein forming the first bit line comprises:

depositing a bit line material over exposed portions of the first dielectric material, the heater material, the second dielectric material, and the phase change material;

etching the bit line material to provide a line of bit line material contacting the heater material; and

recess etching the line of bit line material to expose sidewalls of the second dielectric material to provide the first bit line.

25. The method of claim 20 , wherein forming the second bit line comprises:

depositing a third dielectric material over exposed portions of the first dielectric material, the first bit line, the second dielectric material, and the phase change material;

planarizing the third dielectric material to expose the second dielectric material;

depositing a bit line material over exposed portions of the third dielectric material, the second dielectric material and the phase change material; and

etching the bit line material to provide the second bit line contacting the phase change material.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 9, 2015
From: INFINEON TECHNOLOGIES AG
To: POLARIS INNOVATIONS LIMITED
Reel/Frame 036575/0670 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 8, 2015
From: QIMONDA AG
To: INFINEON TECHNOLOGIES AG
Reel/Frame 035623/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 9, 2010
From: HAPP, THOMAS, DR.; PHILIPP, JAN BORIS, DR.
To: QIMONDA AG
Reel/Frame 024807/0188 →