Method for manufacturing nano-crystalline silicon material for semiconductor integrated circuits
A method for forming a nanocrystalline silicon structure for the manufacture of integrated circuit devices, e.g., memory, dynamic random access memory, flash memory, read only memory, microprocessors, digital signal processors, application specific integrated circuits. In a specific embodiment, the present invention includes providing a semiconductor substrate including a surface region. The method includes forming an insulating layer (e.g., silicon dioxide, silicon nitride, silicon oxynitride) overlying the surface region according to a specific embodiment. The method includes forming an amorphous silicon material of a determined thickness of less than twenty nanometers overlying the insulating layer. The method includes subjecting the amorphous silicon material to a thermal treatment process to cause formation of a plurality of nanocrystalline silicon structures derived from the thickness of amorphous silicon material less than twenty nanometers.
1. A method for forming a nanocrystalline silicon structure for the manufacture of integrated circuit devices, the method comprising:
providing a semiconductor substrate including a surface region;
forming an insulating layer characterized by a high K dielectric constant overlying the surface region;
forming an amorphous silicon layer of a determined thickness of less than twenty nanometers overlying the insulating layer using Si 3 H 4 ;
maintaining a temperature of about 600 degrees Celsius and less during a portion of time associated with forming the amorphous silicon material;
subjecting the amorphous silicon layer to a thermal treatment process to cause formation of a plurality of nanocrystalline silicon structures derived from the thickness of the amorphous silicon layer less than twenty nanometers while maintaining the amorphous silicon layer in an inert environment.
2. The method of claim 1 wherein the amorphous silicon layer is provided by a silane gas.
3. The method of claim 1 wherein the amorphous silicon layer is provided by a SiH 4 gas.
4. The method of claim 1 wherein the amorphous silicon layer is provided by a Si 2 H 6 gas.
5. The method of claim 1 wherein the amorphous silicon layer is provided by a Si 3 H 4 gas.
6. The method of claim 1 wherein the amorphous silicon layer is provided by a sputtering process.
7. The method of claim 1 wherein the inert environment comprises an argon gas.
8. The method of claim 1 wherein the inert environment comprises a nitrogen gas.
9. The method of claim 1 wherein the inert environment comprises a helium gas.