Method for selective under-etching of porous silicon
View Patent ↗A method for making a solar cell is disclosed. In accordance with the method of the present invention a composite wafer is formed. The composite layer includes a single crystal silicon wafer, a silicon-based device layer and sacrificial porous silicon sandwiched therebetween. The composite wafer is treated to an aqueous etchant maintained below ambient temperatures to selectively etch the sacrificial porous silicon and release or undercut the silicon-based layer from the single crystal silicon wafer. The released silicon device layer is attached to a substrate to make a solar cell and the released single crystal silicon wafer is reused to make additional silicon device layer.
1. A method of making a solar cell, the method comprising:
a) depositing a sacrificial porous silicon layer on a single crystal silicon wafer to form a base wafer;
b) forming a crystalline silicon layer on the sacrificial porous silicon layer to form a composite wafer;
c) selectively etching the sacrificial porous silicon layer to remove the sacrificial porous silicon layer and to form a released crystalline silicon layer by treating the composite wafer with an aqueous etchant at a concentration of 5% or less by weight and a non-ionic surfactant comprising a copolymer of poly(ethylene oxide) and poly(propylene oxide), the aqueous etchant maintained at a temperature in a range of 0 to 10 degrees Celsius, wherein aqueous etchant further comprising an alcohol in a concentration of 10% or less by weight, and one or more of potassium hydroxide, sodium hydroxide and hydrogen fluoride, thereby forming a released crystalline silicon layer; and
d) attaching the released crystalline silicon layer to a substrate to form the solar cell.
2. The method of claim 1 , wherein the aqueous etchant comprises one or more of potassium hydroxide, sodium hydroxide and hydrogen fluoride.
3. The method of claim 1 , wherein the aqueous etchant further comprises isopropyl alcohol.
4. The method of claim 1 , further comprising treating the composite wafer and the aqueous etchant with ultrasonic energy.
5. The method of claim 1 , wherein forming a crystalline silicon layer comprises epitaxially growing the crystalline silicon layer using chemical vapor deposition.
6. The method of claim 1 , wherein the sacrificial porous silicon layer comprises a material selected from the group consisting of a carbon doped oxide, a spin-on-glass (SOG) and fluoridated silicon glass (FSG).
7. The method of claim 1 , wherein the crystalline silicon layer is a p-doped crystalline silicon layer.
8. A method of making a solar cell comprising:
a) depositing a sacrificial porous silicon layer on a crystalline wafer;
b) growing a silicon-based device layer on the sacrificial porous silicon layer;
c) patterning the silicon-based device layer with access grooves or holes;
d) selectively etching the sacrificial porous silicon layer through the access grooves or holes with an aqueous etchant and ultrasonic energy, the aqueous etchant maintained at a temperature in a range of 0 to 10 degree Celsius to release at least a portion of the silicon device-based layer; and
e) attaching the released portion of the silicon-based device layer to form the solar cell;
wherein the aqueous etchant comprises a non-ionic surfactant comprising a copolymer of poly(ethylene oxide) and poly(propylene oxide).
9. The method of claim 8 , wherein the aqueous etchant comprises one or more of potassium hydroxide, sodium hydroxide and hydrogen fluoride.
10. The method of claim 9 , wherein the aqueous etchant further comprises an alcohol.
11. The method of claim 10 , wherein the alcohol is isopropyl alcohol.
12. The method of claim 8 , wherein growing the silicon-based device layer on the sacrificial porous silicon layer comprises epitaxially growing the silicon device layer using chemical vapor deposition.
13. The method of claim 8 , wherein the sacrificial porous silicon layer comprises a material selected from the group consisting of a carbon doped oxide, a spin-on-glass (SOG) and fluoridated silicon glass (FSG).
14. The method of claim 8 , wherein the silicon-based device layer is a p-doped crystalline silicon layer.