Forming array contacts in semiconductor memories
View Patent ↗Array contacts for semiconductor memories may be formed using a first set of parallel stripe masks and subsequently a second set of parallel stripe masks transverse to the first set. For example, one set of masks may be utilized to etch a dielectric layer, to form parallel spaced trenches. Then the trenches may be filled with a sacrificial material. That sacrificial material may then be masked transversely to its length and etched, for example. The resulting openings may be filled with a metal to form array contacts.
1. A method comprising:
forming a semiconductor memory array;
forming a dielectric layer over said array;
forming parallel, spaced trenches through said layer;
filling said trenches with a filler material;
forming a plurality of masks extending generally perpendicularly to the length of said filled trenches;
etching out the exposed portions of said filled trenches to form etched out portions; and
filling said etched out portions with a metal.
2. The method of claim 1 including etching out an upper portion of said filled trenches and leaving a lower portion of said filled trenches.
3. The method of claim 2 including forming array contacts coupled to a metal line.
4. The method of claim 3 including forming said metal line and said array contacts in the same metallization.
5. The method of claim 1 including forming array contacts and metal lines in a dual damascene process.
6. The method of claim 1 including forming parallel spaced active areas and forming said trenches parallel to the length of the active areas.
7. The method of claim 1 including forming parallel spaced active areas and forming said trenches perpendicular to the length of the active areas.
8. A method comprising:
forming a semiconductor memory array;
covering said array with a dielectric material;
forming a plurality of parallel spaced filled trenches in said dielectric material;
forming a plurality of spaced openings along the length of each of said trenches; and
filling said openings with a metal to form array contacts.
9. The method of claim 8 including forming said openings using a plurality of spaced parallel masks extending generally transversely to masks used to form said trenches.
10. The method of claim 8 including etching out an upper portion of said filled trenches and leaving a lower portion of said filled trenches.
11. The method of claim 10 including forming metal lines in said etched out upper portion of said trenches.
12. The method of claim 11 including forming array 2 contacts extending transversely to said metal lines using said openings.
13. The method of claim 8 including forming array contacts of metal lines in a dual damascene process.
14. The method of claim 8 including forming spaced active areas and forming said trenches parallel to the length of said active areas.
15. The method of claim 8 including forming parallel spaced active areas and forming said trenches perpendicular to the lengths of the active areas.