Process for forming an electronic device including a fin-type transistor structure
View Patent ↗An electronic device can include an insulating layer and a fin-type transistor structure. The fin-type structure can have a semiconductor fin and a gate electrode spaced apart from each other. A dielectric layer and a spacer structure can lie between the semiconductor fin and the gate electrode. The semiconductor fin can include channel region including a portion associated with a relatively higher V T lying between a portion associated with a relatively lower V T and the insulating layer. In one embodiment, the supply voltage is lower than the relatively higher V T of the channel region. A process for forming the electronic device is also disclosed.
1. A method of forming a first fin-type structure of an electronic device comprising:
forming a first semiconductor fin of a first fin-type transistor structure overlying an insulating layer and including a channel region, the channel region of the first semiconductor fin having a first portion and a second portion, the first portion lying between the second portion and the insulating layer, and both the first portion and the second portion having one of a p-type channel doping or an n-type channel doping;
forming a first gate electrode spaced apart from and adjacent to the first semiconductor fin;
forming a first layer lying between the first gate electrode and the first semiconductor fin; and
forming a first spacer structure, lying between the first gate electrode and the first portion, wherein at least part of the second portion extends beyond a height of the first spacer structure.
2. The method of claim 1 , wherein the insulating layer comprises a buried insulating layer of a semiconductor-on-insulator substrate.
3. The method of claim 1 , wherein the first layer comprises a dielectric material.
4. The method of claim 1 , wherein the spacer structure comprises an insulating material.
5. The method of claim 1 , wherein, in a cross-section viewed along a channel length direction, the spacer structure has a substantially rectangular shape.
6. The method of claim 1 further comprises forming a cap portion overlying the first semiconductor fin.
7. The method of claim 1 , wherein, in a cross-section viewed along a channel length direction, substantially only the first layer lies between the second portion of the first semiconductor fin and the first gate electrode.
8. The method of claim 1 further comprising:
forming a second semiconductor fin of a second fin-type transistor structure overlying the insulating layer and including a channel region, the channel region of the second semiconductor fin having a third portion and a fourth portion, the third portion lying between the fourth portion and the insulating layer;
forming a second gate electrode, spaced apart from and adjacent to the second semiconductor fin; and
forming a second layer lying between the second gate electrode and the second semiconductor fin.
9. The method of claim 8 , wherein the first fin-type transistor structure comprises a p-doped channel region and the second fin-type transistor structure comprises an n-doped channel region.
10. The method of claim 8 , wherein the height of the first semiconductor fin and the height of the second semiconductor fin are substantially the same.
11. The method of claim 10 , wherein an effective channel width of the first fin-type transistor structure is less than an effective channel width of the second fin-type transistor structure.
12. The method of claim 8 , further comprising forming a second spacer structure lying between the second gate electrode and the third portion of the channel region of the second semiconductor fin, wherein at least part of the fourth portion of the channel region of the second semiconductor fin extends beyond the height of the second spacer structure.
13. The method of claim 12 , wherein, the height of the first spacer structure is larger than the height of the second spacer structure.
14. The method of claim 13 , wherein an effective channel width of the first fin-type transistor structure is smaller than an effective channel width of the second fin-type transistor structure.
15. The method of claim 12 , wherein the first and second fin-type transistor structures comprise channel regions of opposite conductivity types.
16. A method of forming an electronic device comprising:
forming a first semiconductor fin of a first fin-type transistor structure overlying an insulating layer and including a channel region that includes a first portion and a second portion, the first portion lying between the second portion and the insulating layer, and both the first portion and the second portion of the channel region having one of a p-type channel doping or an n-type channel doping; and
forming a first gate electrode spaced apart from and adjacent to the first and second portions of the channel region, the first gate electrode spaced apart from the first portion of the channel region by an amount greater than the first gate electrode is spaced apart from the second portion of the channel region, wherein the first portion of the channel has a greater V T than the second portion of the channel.
17. The method of claim 16 , wherein the first V T is larger than an operating voltage of the electronic device.
18. The method of claim 16 further comprising:
forming a second semiconductor fin of a second fin-type transistor structure overlying the insulating layer and including a channel region that includes a third portion and a fourth portion, the third portion lying between the fourth portion and the insulating layer, and both the third portion and the fourth portion of the channel region having one of a p-type channel doping or an n-type channel doping;
forming a second gate electrode spaced apart from and adjacent to the third and fourth portions of the channel region, the second gate electrode spaced apart from the third portion of the channel region by an amount greater than the second gate electrode is spaced apart from the fourth portion of the channel region.
19. The method of claim 18 , wherein the first and second portion of the channel region of the first fin-type transistor structure comprises a p-doped region, and the third and fourth channel region of the second fin-type transistor structure comprises an n-doped region.
20. The method of claim 18 , further comprising forming a second spacer structure lying between the second gate electrode and the third portion of the channel region of the second semiconductor fin, wherein at least part of the fourth portion of the channel region of the second semiconductor fin extends beyond the height of the second spacer structure.