Die bonding utilizing a patterned adhesion layer
View Patent ↗An electronic package and method and system for forming the electronic package. The electronic package has a first substrate including a first electronic device and including through-holes extending through an entire thickness of the first substrate. The electronic package has a second substrate bonded to the first substrate, metallizations formed in the through-holes of the first substrate to connect to components of the first electronic device, and a patternable substance disposed between the first substrate and the second substrate and adhering the first substrate and the second substrate together in regions apart from the metallizations. The method and system form through-holes extending through an entire thickness of the first substrate, deposit and pattern an adherable substance on the second substrate in a pattern having openings which expose connections for a second electronic device of the second substrate, align and attach the first substrate and the second substrate together, and form metallizations in the through-holes to connect to the connections for the second electronic device.
1. A method for forming an electronic package including first and second substrates, comprising:
forming through-holes extending through an entire thickness of the first substrate;
depositing and patterning an adherable substance on the second substrate in a pattern having openings which expose connections to an electronic device of the second substrate;
prior to bonding of the first substrate and the second substrate together, partially curing the adherable substance to a state where the adherable substance is resistant to flow into the through-holes during a subsequent bonding of the first substrate and the second substrate together;
aligning and attaching the first substrate and the second substrate together via the patterned adherable substance without reflow of the adherable substance into the through-holes; and
forming metallizations in the through-holes to connect to said connections for the electronic device.
2. The method of claim 1 , wherein aligning comprises aligning the through-holes with the exposed connections on the second substrate.
3. The method of claim 1 , wherein forming through-holes comprises forming the through-holes in a pattern corresponding to said connections for the second electronic device.
4. The method of claim 3 , wherein forming the through-holes in a pattern comprises:
lithographic patterning and deep ion etching said pattern; or
laser drilling said pattern.
5. The method of claim 1 , wherein attaching comprises adhering the first substrate and the second substrate together with said adherable substance including at least one of an adhesive, an eutectic metal, or a silica based glass.
6. The method of claim 1 , further comprising planarizing said adherable substance prior to said attaching the first substrate and the second substrate together.
7. The method of claim 1 , wherein attaching comprises adhering the first substrate and the second substrate together with a patternable adhesive.
8. The method of claim 7 , wherein attaching comprises adhering the first substrate and the second substrate together with a planarized, patternable adhesive.
9. The method of claim 1 , wherein forming through-holes comprises forming the through-holes in a thinned glass or semiconductor substrate.
10. The method of claim 1 , further comprising forming an insulating film on the walls of said through-holes to insulate a body of the first substrate from said metallizations in the through-holes.
11. A system for forming an electronic package, comprising:
a wafer handler configured to handle a first substrate including through-holes and a second substrate;
a through-hole formation unit configured to form said through-holes in a pattern corresponding to connections for an electronic device of the second substrate;
a metallization unit configured to deposit said metallization into the through-holes to connect to components of the electronic device; and
a wafer processor configured to 1) apply and pattern an adherable substance on the second substrate to produce a pattern in the adherable substance having openings which expose said connections to the second electronic device of the second substrate, 2) align the first and second substrates, and 3) attach the first substrate and the second substrate together.